AMAT 0020-57650
Product Name: Upper Chamber Shield / Focus Ring Assembly
Product Description: A high-purity, machined aluminum shield component that lines the upper region of the process chamber. It protects the chamber walls from plasma bombardment, controls plasma distribution, and minimizes deposition of process byproducts.
Technical Specifications:
- Material: High-purity 6061-T6 aluminum alloy







.jpg)



.jpg)