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AMAT 0021-21799

Product Name: Process Chamber Shield/Isolator Component
Product Introduction: A specialized shield or isolator component used within semiconductor process chambers to protect sensitive elements.
Technical Specifications:
  • Material: High-purity ceramic, quartz, or metal alloy

AMAT 0040-41326

Product Name: Chamber Body/Chamber Component
Product Introduction: A critical structural component forming part of the process chamber in AMAT semiconductor manufacturing equipment.
Technical Specifications:
  • Material: High-grade aluminum alloy or stainless steel

AMAT 0020-26217

Product Name: Ceramic/Quartz Process Chamber Component
Product Introduction: A specialized ceramic or quartz component used as an insulator or shield in semiconductor process chambers.
Technical Specifications:
  • Material: High-purity ceramic or fused quartz

AMAT 0041-28765

Product Name: Insulator Component (RF Bias Application)
Product Introduction: A high-performance electrical insulator designed for RF bias applications in HDPCVD (High-Density Plasma Chemical Vapor Deposition) systems.
Technical Specifications:
  • Material: High-purity ceramic or advanced dielectric material

AMAT AFC550

Product Name: AFC550 Mass Flow Controller (MFC)
Product Introduction: A precision gas flow control device designed for semiconductor manufacturing processes, providing accurate regulation of process gas flow rates.
Technical Specifications:
  • Flow Rate Range: 6–300 cc/min (hydrogen), 20–1000 sccm (nitrogen), up to 10 SLPM (other gases)

AMAT 0100-9066

Product Name: Analog I/O Interface Module Assembly
Product Description: A high-performance analog I/O interface module assembly designed for precise signal acquisition and control in semiconductor manufacturing equipment.
Technical Specifications:
  • Input Voltage: 24V DC ±10%

AMAT 0200-01393

Product Name: Gas Distribution Plate Assembly
Product Description: A precision-engineered gas distribution plate assembly for semiconductor process chambers, providing uniform gas distribution for consistent thin-film deposition processes.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 262-78189-57V1

Product Name: RF Match Network Module Assembly
Product Description: A high-performance RF match network module assembly designed for precise impedance matching in semiconductor plasma processing equipment, ensuring efficient RF power transfer to process chambers.
Technical Specifications:
  • Input Voltage: 24V DC ±10%

AMAT 0020-53569

Product Name: Wafer Support Pin Assembly
Product Description: A precision-engineered wafer support pin assembly designed for stable wafer positioning in semiconductor process chambers, ensuring accurate processing with minimal contamination.
Technical Specifications:
  • Material: High-purity alumina ceramic (99.8%)

AMAT 0100-09307

Product Name: Serial Communication PCB Card Assembly
Product Description: A high-performance serial communication PCB card assembly designed for reliable data transmission and system control in semiconductor manufacturing equipment.
Technical Specifications:
  • Input Voltage: 24V DC (typical)

AMAT 0040-75377

Product Name: Heater Manifold Assembly
Product Description: A precision-engineered heater manifold assembly designed for uniform temperature distribution in semiconductor process chambers, ensuring consistent wafer processing conditions.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0040-07609

Product Name: Chamber Body Flange Assembly
Product Description: A precision-engineered chamber body flange assembly providing a vacuum-tight connection between chamber components in semiconductor manufacturing equipment.
Technical Specifications:
  • Material: 316L stainless steel