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AMAT 0041-76691

Product Name: 300mm CMP Retaining Ring
Product Description: A high-performance retaining ring for chemical mechanical planarization (CMP) systems that holds wafers securely during polishing while maintaining uniform pressure distribution.
Technical Specifications:
  • Material: Filled PEEK (polyetheretherketone) composite

AMAT 0050-85778

Product Name: High-Purity Pneumatic Diaphragm Valve
Product Description: A normally closed, pneumatically actuated diaphragm valve for ultra-high-purity gas and chemical control in semiconductor process systems.
Technical Specifications:
  • Valve Type: 2-way, normally closed, diaphragm

AMAT 881-CE-0209-00

Product Name: RF Power Monitor Module
Product Description: A high-precision RF power measurement and monitoring module designed for real-time measurement of forward and reflected RF power in plasma process chambers.
Technical Specifications:
  • Frequency Range: 400 kHz – 60 MHz

AMAT 0020-04362

Product Name: Quartz Gas Distribution Plate
Product Description: A high-purity fused quartz plate with precision-drilled holes for uniform distribution of process gases across the wafer surface in PECVD chambers.
Technical Specifications:
  • Material: Synthetic fused silica (SiO₂, >99.999% purity)

AMAT D-681810

Product Name: Precision Deep Groove Ball Bearing
Product Description: A high-precision single-row deep groove ball bearing engineered for smooth, low-friction rotational motion in semiconductor wafer handling and positioning systems.
Technical Specifications:
  • Type: Single-row deep groove ball bearing

AMAT 0020-22476

Product Name: High-Purity Ceramic Insulator Ring
Product Description: A precision-machined ceramic ring that provides electrical isolation and thermal stability between the RF cathode and chamber ground in PECVD/RIE chambers.
Technical Specifications:
  • Material: Aluminum Nitride (AlN, 99.5% purity)

AMAT 0190-89038

Product Name: Digital I/O Interface Module
Product Description: A high-density digital input/output (I/O) module that provides signal interfacing between the main system controller and various chamber sensors, actuators, and peripheral devices in semiconductor tools.
Technical Specifications:
  • Input Channels: 16 optically isolated digital inputs (24V DC)

AMAT 0050-37557

Product Name: Precision Gas Flow Restrictor Assembly
Product Description: A fixed-orifice flow restrictor designed to provide precise, stable gas flow regulation for low-flow process gas applications in semiconductor manufacturing.
Technical Specifications:
  • Material: 316L stainless steel (wetted parts)

AMAT 0040-33590

Product Name: 200mm Cathode Base Cooling Assembly
Product Description: A high-performance cooling base assembly that provides active thermal management for 200mm RF cathodes in PECVD chambers, maintaining stable process temperatures during high-power deposition.
Technical Specifications:
  • Material: 6061-T6 aluminum (hard-anodized)

AMAT 0050-34811

Product Name: Ultra-High-Purity Gas Weldment Manifold
Product Description: A precision-welded stainless steel manifold designed for distributing ultra-high-purity process gases to multiple process chambers, ensuring leak-tight, contamination-free gas delivery.
Technical Specifications:
  • Material: 316L VIM-VAR stainless steel (electropolished)

AMAT 0010-70162

Product Name: Slit Valve Actuator Assembly
Product Description: A precision pneumatic actuation assembly engineered to control the opening and closing of slit valves in semiconductor process chambers, ensuring vacuum isolation and reliable wafer passage between process modules.
Technical Specifications:
  • Actuation Type: Pneumatic, double-acting cylinder

AMAT 0020-00153

Product Name: Precision Bearing Guide
Product Description: A self-lubricating, high-precision bearing guide for linear motion assemblies, ensuring smooth, low-friction movement in wafer handling and positioning mechanisms.
Technical Specifications:
  • Material: 440C stainless steel (hardened)