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AMAT 0190-62183

Product Name: Capacitance Manometer Module
Product Description: A high-precision capacitance manometer designed for absolute pressure measurement in semiconductor vacuum processing systems. It provides stable and accurate pressure readings across a wide vacuum range.
Technical Specifications:
  • Measurement Range: 1 mTorr to 1000 Torr

AMAT 0190-09764

Product Name: Digital I/O Interface Module
Product Description: A high-density digital input/output module designed for reliable signal interfacing between semiconductor equipment control systems and field devices. It enables precise control and monitoring of discrete signals in advanced manufacturing environments.
Technical Specifications:
  • Input Channels: 16 optically isolated digital inputs

AMAT 0021-33836

Product Name: Ceramic Mounting Bracket
Product Description: A precision-formed ceramic structural component used for mounting, supporting, and isolating electrodes, sensors, and fixtures inside semiconductor vacuum process chambers.
Technical Specifications:
  • Material: High-purity macor ceramic or alumina

AMAT 0021-16858

Product Name: Quartz Shield Assembly
Product Description: A high-purity quartz protective component used to shield internal chamber parts from plasma exposure while maintaining optical transparency for process monitoring.
Technical Specifications:
  • Material: High-purity synthetic fused silica

AMAT 0021-00105

Product Name: Ceramic Insulation Washer
Product Description: A high-purity ceramic washer providing electrical insulation and mechanical spacing between conductive components in high-voltage and vacuum semiconductor environments.
Technical Specifications:
  • Material: High-purity alumina ceramic (Al₂O₃)

AMAT 0010-76440

Product Name: Analog Output Module
Product Description: A signal conditioning module that converts digital control signals into stable analog outputs for controlling process variables such as pressure, flow, and power in semiconductor tools.
Technical Specifications:
  • Output Signal Range: 0–10V, 4–20mA configurable

AMAT 0010-76097

Product Name: System Interlock Controller Module
Product Description: A safety control module that monitors critical system parameters and enforces interlock conditions to protect personnel, wafers, and semiconductor equipment during operation.
Technical Specifications:
  • Input Channels: Multiple digital safety interlock inputs

AMAT 0010-06062

Product Name: Relay Control Board Assembly
Product Description: An electronic control board that manages high-power switching for valves, heaters, motors, and actuators in semiconductor manufacturing equipment using isolated relay outputs.
Technical Specifications:
  • Output Type: Electromechanical or solid-state relays

AMAT 0010-01198

Product Name: Temperature Monitor Board
Product Description: A printed circuit board assembly dedicated to collecting, conditioning, and processing temperature signals from multiple sensors in semiconductor processing equipment.
Technical Specifications:
  • Sensor Inputs: Thermocouple, RTD, thermistor compatible

AMAT 0190-23441

Product Name: Flow Control Valve Assembly
Product Description: A high-purity flow control valve used to precisely regulate the flow rate of process gases in semiconductor vacuum and gas delivery systems.
Technical Specifications:
  • Operating Pressure: Vacuum to 150 PSI

AMAT 0190-0944

Product Name: Pressure Transducer Module
Product Description: A high-precision pressure sensing module designed for real-time monitoring and control of gas pressure and vacuum levels in semiconductor manufacturing utility and process systems.
Technical Specifications:
  • Measurement Range: 0.1 Torr to 1000 Torr

AMAT 0020-25897

Product Name: Edge Ring Assembly
Product Description: A precision-machined annular component used in semiconductor process chambers to stabilize wafer position, improve plasma uniformity, and protect chamber interior structures from process byproducts.
Technical Specifications:
  • Material: High-grade aluminum alloy with hard anodized coating