Digital guide
You are here:
AMAT 0021-36302
Brand & Part Number: Applied Materials (AMAT) 0021-36302
Product Name: Precision Machined Chamber Shield / Isolation Ring
Product Description: A high-precision structural component designed for semiconductor process chambers, providing electrical isolation and plasma containment.
Detailed content
Technical Specifications:
- Material: High-purity aluminum oxide (Al₂O₃) ceramic or anodized 6061 aluminum alloy
- Dimensional Tolerance: ±0.0005 inches for critical features
- Surface Finish: Ra ≤ 0.4 μm (electropolished for metallic variants)
- Temperature Endurance: -20°C to +450°C continuous operation
Functional Features:
- Exceptional dielectric strength for high-voltage RF isolation
- High chemical inertness, resisting corrosion from fluorine and chlorine-based plasmas
- Low outgassing rate compliant with UHV (Ultra-High Vacuum) standards
- Precision-machined geometry ensures uniform gas flow and plasma distribution
Application: Utilized in Etch, PVD, and CVD chambers on 200mm/300mm wafer platforms as a shield, liner, or isolation ring.
