HIMA M3410 Safety Relay Module
- Safety Certification: SIL 3 (IEC 61508), PLe (EN ISO 13849-1)
Product Description: The Gasonics 90-2590 is typically identified as a Robotic Transfer Arm Assembly or a Wafer Handling End Effector for Gasonics automated wet benches and cluster tools. It is the core mechanism responsible for moving wafers between cassettes, process tanks, and chill/rinse stations with high precision and speed. Technical Specifications:
Product Description: The Gasonics 95-0503 A is a Master Maintenance Kit or a General Hardware Upgrade Kit. The "A" designation typically indicates the primary or "Class A" version of the kit, containing the most critical consumables and spare parts required for major tool overhauls. It is a comprehensive package designed to extend the lifespan of the equipment. Technical Specifications: