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AMAT 0050-08366

Product Name: High-Purity Fluid Delivery Tube / Manifold Line
Product Description: A seamless, precision-drawn stainless steel tubing assembly for ultra-high-purity (UHP) gas and liquid delivery in semiconductor process tool utility panels. Ensures contamination-free fluid transport.
Technical Specifications:
  • Material: 316L VAR (Vacuum Arc Remelted) stainless steel

AMAT 0021-04643

Product Name: Dark Space Upper Shield / Plasma Confining Ring
Product Description: A specialized upper chamber shield that defines the "dark space" region above the plasma, preventing unwanted plasma interactions with the chamber lid and upper fixtures. It stabilizes plasma geometry and improves process uniformity.
Technical Specifications:
  • Material: Ultra-high-purity aluminum alloy (6061-T6)

AMAT 0020-26173

Product Name: Gas Distribution Baffle / Plate Assembly
Product Description: A precision-perforated flow plate installed beneath the showerhead to create a uniform, laminar gas flow distribution across the wafer surface. It eliminates turbulence and ensures consistent process gas delivery.
Technical Specifications:
  • Material: High-purity, electropolished 316L stainless steel

AMAT 0020-51915

Product Name: Lower Chamber Liner / Deposition Shield
Product Description: A one-piece, cylindrical protective liner installed in the lower chamber section. It shields the chamber base and pump port from coating accumulation, ensures uniform gas flow, and simplifies maintenance by containing process residues.
Technical Specifications:
  • Material: High-purity aluminum or 316L stainless steel

AMAT 0020-57650

Product Name: Upper Chamber Shield / Focus Ring Assembly
Product Description: A high-purity, machined aluminum shield component that lines the upper region of the process chamber. It protects the chamber walls from plasma bombardment, controls plasma distribution, and minimizes deposition of process byproducts.
Technical Specifications:
  • Material: High-purity 6061-T6 aluminum alloy

AMAT 0030-20002

Product Name: Precision Vacuum Feedthrough Assembly (Electrical & Signal)
Product Description: A hermetically sealed electrical feedthrough designed to transmit power, signals, and control voltages across the vacuum chamber wall while maintaining ultra-high vacuum (UHV) integrity. It provides isolated electrical pathways for internal sensors, heaters, and actuators.
Technical Specifications:
  • Material: 316L stainless steel body, alumina ceramic insulation

AMAT 0240-71275

Product Name: Serial Communication / Interface PCB Module
Product Description: An industrial-grade printed circuit board module that manages serial communication, data acquisition, and device control between the main system controller and peripheral equipment modules.
Technical Specifications:
  • Processor: 32-bit industrial microcontroller

AMAT 0020-40683

Product Name: Gas Distribution / Showerhead Insert Component
Product Description: A precision-engineered insert for gas showerhead assemblies that ensures uniform distribution of process gases across the wafer surface. It plays a critical role in achieving thin film uniformity and process consistency.
Technical Specifications:
  • Material: High-purity aluminum or anodized aluminum alloy

AMAT 0242-85548

Product Name: He Dump / Cooling System Retrofit Kit
Product Description: A comprehensive upgrade kit designed to retrofit existing helium cooling systems for improved thermal control efficiency. It includes upgraded components to enhance heat extraction from wafer pedestals.
Technical Specifications:
  • Kit Contents: Upgraded heat exchanger, precision flow control valve, pressure transducers, high-purity tubing, and installation hardware

AMAT 0041-93175

Product Name: Turbo Pump Interface / Adapter Flange
Product Description: A precision-machined transition flange that provides a vacuum-tight connection between the process chamber and high-speed turbomolecular vacuum pump. It ensures alignment, structural support, and maintains UHV integrity.
Technical Specifications:
  • Material: Forged aluminum alloy 6061-T6 / 316L stainless steel

AMAT 0140-36112

Product Name: AC Power Distribution Cable Assembly – Ozone Generator

Product Description: A heavy-duty, industrial-grade power cable assembly designed to safely deliver alternating current from the main power distribution unit to the ozone generator module in semiconductor wafer cleaning systems.
Technical Specifications:
  • Cable Type: Multi-conductor, shielded power cable

AMAT 0020-48304

Product Name: Process Shield / Chamber Liner Assembly
Product Description: A consumable protective liner installed within the process chamber to shield the chamber wall from plasma bombardment, chemical corrosion, and deposition of process byproducts. It optimizes gas flow and extends chamber maintenance intervals.
Technical Specifications:
  • Material: High-purity, plasma-sprayed coated aluminum or SiC composite