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AMAT 0020-26823

Product Name: 6" HTHU Deposition Low Knee Shield
Product Description: A precision-machined annular shield component designed for 6-inch (150mm) wafer process chambers, specifically for HTHU (High Throughput Uniformity) deposition processes. It confines plasma, protects chamber components, and ensures uniform thin-film growth.
Technical Specifications:
  • Wafer Compatibility: 6-inch (150mm) wafer systems.

AMAT 0040-75717

Product Name: CMP Head Membrane / Diaphragm
Product Description: A flexible, elastomeric membrane for the CMP polishing head. It provides uniform pneumatic pressure distribution across the back of the wafer to ensure planar polishing.
Technical Specifications:
  • Material: High-grade, chemically resistant elastomer (e.g., EPDM, Neoprene, or FFKM).

AMAT 0021-16782

Product Name: 300mm Middle Shield (SIP CU Chamber)
Product Description: A large, high-quality metal shield for the middle section of a 300mm PVD chamber (Endura 5500 SIP CU). It confines the plasma and protects upper chamber components.
Technical Specifications:
  • Wafer Size: 300mm (12-inch).

AMAT 0200-40002

Product Name: Quartz / Ceramic Chamber Liner / Shield
Product Description: A high-purity, cylindrical component lining the interior of a process chamber. It protects the chamber walls from coatings, directs gas flow, and contains the plasma.
Technical Specifications:
  • Material: High-purity fused quartz or advanced ceramic (e.g., SiC-coated graphite)

AMAT 0720-05235

Product Name: DeviceNet Tee Connector / Drop Assembly
Product Description: An industrial-grade Tee connector (T-splitter) for the DeviceNet communication network. It allows tapping into a trunk line to connect a drop cable to a device or node.
Technical Specifications:
  • Type: DeviceNet mini-Change (M12) Tee connector.

AMAT M3399X

Product Name: High-Performance Quad Differential Comparator IC
Product Description: An integrated circuit (IC) containing four independent, precision voltage comparators. It is used for signal level detection, threshold switching, and analog signal conditioning in the tool's electronic controls.
Technical Specifications:
  • Type: Quad, single-supply, differential voltage comparator.

AMAT 0200-00317

roduct Name: 200mm Bottom Isolator / Pumping Ring
Product Description: A high-purity ceramic ring installed at the base of a process chamber. It provides electrical isolation and defines the pumping path for process gases and byproducts.
Technical Specifications:
  • Wafer Size: 200mm (8-inch).
  • Material: High-purity alumina (Al₂O₃) ceramic.

AMAT 0100-35207

Product Name: Host Interlock Module (PCB Assembly)
Product Description: A critical safety PCB that monitors and controls interlock signals across the entire tool. It ensures safe operation by enforcing safety logic and preventing hazardous conditions.
Technical Specifications:
  • Type: Safety interlock control module.

AMAT 0100-03242

Product Name: Analog I/O PCB Assembly
Product Description: A printed circuit board assembly designed to handle analog input and output signals for process monitoring and control in semiconductor tools. It interfaces sensors and actuators with the main system controller.
Technical Specifications:
  • Channels: Multi-channel analog input (AI) and analog output (AO).

AMAT 0040-76428

Product Name: CMP Retaining Ring / Profile Ring
Product Description: A precision-machined component for Chemical Mechanical Planarization (CMP) systems, designed to retain the wafer on the polishing platen and ensure uniform material removal.
Technical Specifications:
  • Material: High-performance composite or engineered polymer (e.g., PPS, PEI).

AMAT 0010-07913

Product Name: Precision Motor / Actuator Assembly
Product Description: A high-precision electromechanical motor or actuator assembly designed for precise motion control within semiconductor processing equipment. It delivers accurate positioning for critical subsystems such as wafer handling, valve control, or stage movement.
Technical Specifications:
  • Type: Servo or stepper motor with integrated encoder for position feedback

AMAT 0090-90140

Product Name: Vacuum Manual Control Target System / Interface Module
Product Description: A manual control interface module for vacuum and process target systems. It enables local operator control, monitoring, and adjustment of vacuum parameters or target functions.
Technical Specifications:
  • Function: Manual control and monitoring interface for vacuum systems.