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AMAT 0020-37221 Precision Metal Shield Assembly

Product Overview: The AMAT 0020-37221 is a precision-engineered metal shield assembly designed for Applied Materials semiconductor processing equipment. It protects critical chamber components from plasma erosion, process contamination, and thermal damage, while ensuring uniform plasma distribution across the wafer surface. Manufactured from high-purity aluminum or titanium, this shield assembly delivers exceptional corrosion resistance, thermal stability, and dimensional accuracy for long-term reliability.
Technical Specifications:
  • Material: High-purity 6061-T6 aluminum or commercially pure titanium (Grade 2), customer-specified.

AMAT 0020-20726 Ceramic Wafer Support Pedestal

Product Overview: The AMAT 0020-20726 is a high-precision ceramic wafer support pedestal designed for Applied Materials semiconductor processing equipment. It provides stable, uniform support for wafers during etching, deposition, and thermal processing, ensuring consistent process conditions across the wafer surface. Manufactured from high-purity alumina ceramic, this pedestal delivers exceptional thermal stability, plasma resistance, and dimensional accuracy for advanced wafer processing.
Technical Specifications:
  • Material: 99.99% high-purity alumina (Al₂O₃) ceramic, with a porous surface for vacuum chucking.
  • Dimensions: Diameter 300mm, thickness 20mm, with precision-machined wafer locating notches.

AMAT 0190-22545 Digital I/O Interface Module

Product Overview: The AMAT 0190-22545 is a high-performance digital input/output (I/O) interface module designed for Applied Materials semiconductor equipment control systems. It provides reliable, high-speed communication between the equipment main controller and peripheral devices (sensors, actuators, valves, motors), enabling precise process control and equipment automation. This module features isolated I/O channels, EMI protection, and seamless integration with AMAT’s control software.
Technical Specifications:
  • I/O Configuration: 16×digital inputs (24V DC, sinking/sourcing), 16×digital outputs (24V DC, 0.5A).
  • Isolation: 2500V DC optical isolation between I/O channels and the main controller.

AMAT 0190-88747 High-Sensitivity Temperature Sensor Module

Product Overview: The AMAT 0190-88747 is a high-sensitivity temperature sensor module designed for real-time temperature monitoring in Applied Materials semiconductor processing equipment. It provides precise, fast-response temperature measurements of critical components (chamber walls, heaters, wafers), enabling closed-loop process control and over-temperature protection. This module features advanced thermocouple technology, EMI shielding, and rugged packaging for reliable operation in harsh fab environments.
Technical Specifications:
  • Sensor Type: K-type thermocouple, precision-grade, with a 1mm diameter Inconel sheath.

AMAT 0010-39912 Wafer Handling Robot End Effector

Product Overview: The AMAT 0010-39912 is a precision-engineered wafer handling robot end effector designed for Applied Materials automated wafer handling systems. It provides secure, non-contact wafer gripping and transfer using vacuum suction, ensuring zero wafer damage and contamination. This end effector features a lightweight, rigid design, advanced vacuum control, and compatibility with 200mm/300mm wafers, making it critical for high-speed, high-volume semiconductor manufacturing.
Technical Specifications:
  • Material: Carbon fiber composite body, with high-purity ceramic suction cups.

AMAT 0020-09636 Product Name: Quartz Isolator Sleeve

Product Overview: The AMAT 0020-09636 is a high-purity quartz isolator sleeve designed for electrical insulation and thermal protection in Applied Materials semiconductor equipment. It insulates high-voltage components (electrodes, RF feedthroughs, sensor wiring) from chamber bodies and other conductive parts, preventing electrical arcing and ensuring safe operation in high-temperature, high-vacuum environments. Quartz’s exceptional electrical insulation, thermal stability, and plasma transparency make this sleeve ideal for plasma processing applications.
Technical Specifications:
  • Material: High-purity fused quartz (SiO₂), purity ≥ 99.999%, with zero metallic impurities.

AMAT 3310-00282 Wafer Edge Ring Assembly

Product Overview: The AMAT 3310-00282 is a precision-engineered wafer edge ring assembly designed for Applied Materials semiconductor processing equipment. It surrounds the wafer perimeter during processing, ensuring uniform plasma distribution across the wafer surface, protecting the wafer edge from excessive etching or deposition, and preventing process contamination. Manufactured from high-purity ceramic or silicon carbide, this edge ring delivers exceptional plasma resistance, thermal stability, and dimensional accuracy for advanced wafer processing.
Technical Specifications:
  • Material: 99.9% silicon carbide (SiC) or high-purity alumina (Al₂O₃), customer-specified.

AMAT 0190-70076 High-Precision RF Match Network Controller

Product Overview: The AMAT 0190-70076 is a high-performance RF match network controller designed for Applied Materials plasma processing equipment. It provides real-time control and optimization of RF power delivery to plasma chambers, ensuring maximum power transfer efficiency, stable plasma ignition, and consistent process performance. This controller features advanced digital signal processing (DSP) technology, fast response times, and seamless integration with AMAT’s equipment control systems, making it critical for plasma etching and deposition processes.
Technical Specifications:
  • Frequency Range: 13.56 MHz (standard), compatible with 2 MHz, 27 MHz, and 60 MHz RF generators.

AMAT 0050-41308 High-Purity Gas Line Weldment Assembly

Product Overview: The AMAT 0050-41308 is a precision-engineered gas line weldment assembly designed for the ultra-high-purity gas delivery systems of Applied Materials semiconductor equipment. It facilitates the safe, leak-tight transport of process gases (inert, reactive, corrosive) between gas cabinets, mass flow controllers, and process chambers. Manufactured with precision welding and electropolishing, this assembly ensures zero contamination, minimal dead volume, and maximum gas purity—critical for advanced semiconductor manufacturing processes.
Technical Specifications:
  • Material: 316L VAR (Vacuum Arc Remelted) stainless steel, electropolished to Ra ≤ 0.05μm.

AMAT 0020-25658 Vespel Centering Clamp Ring

Product Overview: The AMAT 0020-25658 is a high-performance centering clamp ring manufactured from Vespel (polyimide) material, designed exclusively for Applied Materials semiconductor equipment. It serves as a precision centering and clamping component for process chamber inserts, gas distribution plates, and wafer support assemblies, ensuring precise alignment and secure fastening in high-temperature, high-vacuum environments. Vespel’s unique properties make this clamp ring resistant to thermal expansion, chemical attack, and plasma erosion, delivering long-term reliability in demanding fab conditions.
Technical Specifications:
  • Material: Vespel SP-21 polyimide, reinforced with carbon fiber for enhanced mechanical strength.

AMAT 0020-30917 Precision Ceramic Lift Pin Assembly

Product Overview: The AMAT 0020-30917 is a high-precision ceramic lift pin assembly engineered for Applied Materials semiconductor processing equipment. It is designed to safely lift, support, and position wafers within process chambers, load locks, and wafer handling systems, ensuring zero-contact, scratch-free handling of delicate semiconductor wafers. Manufactured from ultra-high-purity ceramic materials, this assembly delivers exceptional mechanical stability, thermal resistance, and plasma compatibility, making it a critical component for maintaining wafer integrity and process uniformity in advanced semiconductor manufacturing. Technical Specifications:
  • Material: 99.99% high-purity alumina (Al₂O₃) ceramic, offering extreme hardness (9 Mohs) and thermal stability.
  • Dimensions: Length 60mm, diameter 3.2mm, with a precision-machined rounded tip (radius 1.2mm) to prevent wafer damage.

AMAT 0020-87594 UPA Front Bracket

Product Overview: The AMAT 0020-87594 is a precision UPA front bracket specifically designed for the 300mm Reflexion LK wafer handling system of Applied Materials semiconductor equipment. It serves as a structural support component, securing critical parts of the wafer handling mechanism, including the robot arm and end effector assembly. This bracket is manufactured from high-strength materials with precise machining, ensuring structural stability, alignment, and compatibility with the Reflexion LK system. It is a critical component for maintaining the precision and reliability of the wafer handling system, ensuring damage-free wafer transfer and consistent operation in high-volume semiconductor production.
Technical Specifications:
- Material Composition: High-strength 6061-T6 aluminum alloy, offering a tensile strength of 310 MPa and excellent corrosion resistance.