Digital guide
You are here:
AMAT 0021-21771
Product Name: Ceramic Isolator Ring Assembly
Product Description: A high-purity ceramic component engineered for electrical isolation and structural support within semiconductor vacuum processing chambers. It provides robust insulation between high-voltage components and grounded chamber structures.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃) ceramic
Detailed content
- Dielectric Strength: >20 kV/mm
- Maximum Operating Temperature: 1500°C
- Vacuum Compatibility: Ultra-high vacuum (UHV) rated
- Surface Finish: Ra < 0.8 μm
- Dimensions: Precision machined to OEM chamber specifications
Functional Features:
- Superior electrical insulation properties
- Excellent thermal stability in extreme process environments
- Chemical resistance to plasma and process gases
- Low outgassing for vacuum integrity
- Non-contaminating material composition
- Precision dimensional tolerances for proper fit
Application Scenarios:
- RF plasma chamber electrode isolation
- Wafer chuck and pedestal support
- Gas distribution plate mounting
- Vacuum feedthrough insulation
- High-voltage component separation
