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AMAT 0224-40643
Product Name: Chamber Top Panel Assembly
Product Description: A structural and functional component forming the upper section of semiconductor processing chambers. It provides mounting for process components and maintains vacuum integrity.
Technical Specifications:
- Material: Anodized aluminum or 316L stainless steel
Detailed content
- Dimensions: Custom sized for specific chamber models
- Surface Finish: Electropolished for vacuum compatibility
- Mounting: Precision alignment with chamber body
- Vacuum Rating: 1×10⁻⁹ Torr leak rate
- Weight: Varies by chamber size (typically 8–15 kg)
Functional Features:
- Excellent vacuum sealing capability
- Structural rigidity for chamber integrity
- Mounting points for gas injectors and sensors
- Easy access for maintenance
- Compatibility with various chamber coatings
- Low outgassing properties
Application Scenarios:
- PVD and CVD process chambers
- Etch and strip systems
- Vacuum wafer processing equipment
- AMAT Endura and Producer platforms
- Semiconductor manufacturing cleanrooms
