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AMAT 0224-40643

Product Name: Chamber Top Panel Assembly
Product Description: A structural and functional component forming the upper section of semiconductor processing chambers. It provides mounting for process components and maintains vacuum integrity.
Technical Specifications:
  • Material: Anodized aluminum or 316L stainless steel

AMAT 0240-33168

Product Name: RF Match Network Assembly
Product Description: A high-performance impedance matching network designed for precise RF power delivery in semiconductor plasma processing equipment. It ensures maximum power transfer between the RF generator and process chamber.
Technical Specifications:
  • Frequency Range: 13.56 MHz (standard)

AMAT 0020-24719

Product Name: 200mm Aluminum Cover Ring Assembly
Product Description: A precision-machined aluminum component designed to surround and protect 200mm wafers during semiconductor processing. It ensures proper wafer positioning and prevents edge effects during deposition and etch processes.
Technical Specifications:
  • Material: High-purity aluminum (AL 233-3889-52)

AMAT 0021-09914

Product Name: Blocker Plate Assembly
Product Description: A precision-engineered metal component used to control gas flow and plasma distribution within semiconductor deposition and etch chambers. It optimizes process uniformity and protects critical chamber components.
Technical Specifications:
  • Material: High-grade aluminum or stainless steel

AMAT 1410-01130

Product Name: Exhaust Heater Assembly
Product Description: A precision heating unit designed to maintain optimal temperatures in semiconductor equipment exhaust systems, preventing condensation and ensuring consistent gas flow.
Technical Specifications:
  • Heating Element: Stainless steel sheathed resistance heater

AMAT 0021-21771

Product Name: Ceramic Isolator Ring Assembly
Product Description: A high-purity ceramic component engineered for electrical isolation and structural support within semiconductor vacuum processing chambers. It provides robust insulation between high-voltage components and grounded chamber structures.
Technical Specifications:
  • Material: High-purity alumina (Al₂O₃) ceramic

AMAT 0090-A0693

Product Name: PMT-100 Photomultiplier Tube Detector Assembly
Product Description: A high-sensitivity optical detection module designed for process endpoint detection in semiconductor manufacturing equipment.
Technical Specifications:
  • Detector Type: Photomultiplier tube (PMT)

AMAT 0050-91046

Product Name: Chemical Delivery Tube Assembly
Product Description: A precision-engineered fluid transfer component designed for high-purity chemical delivery in semiconductor fabrication processes.
Technical Specifications:
  • Material: High-purity PFA or PTFE

AMAT 0620-06832

Product Name: Equipment Monitoring Cable Assembly
Product Description: A high-performance cable assembly designed for connecting monitoring and control components in semiconductor manufacturing equipment.
Technical Specifications:
  • Conductor: Multi-strand tinned copper

AMAT 0050-76890

Product Name: Conductive Cooling Hose Assembly
Product Description: A specialized fluid delivery hose designed for conductive cooling applications in semiconductor manufacturing equipment.
Technical Specifications:
  • Inner Tube: PFA or PTFE with conductive additive

AMAT 0010-09331

Product Name: Throttle Valve Assembly
Product Description: A precision flow control valve designed for regulating gas flow and pressure in semiconductor vacuum processing systems.
Technical Specifications:
  • Actuation Type: Pneumatic or motor-driven

AMAT 3700-01351

Product Name: O-Ring Seal Assembly
Product Description: A precision-engineered elastomer seal designed for vacuum and chemical sealing applications in semiconductor equipment.
Technical Specifications:
  • Material: Kalrez® 4079 or Viton® fluoroelastomer