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AMAT 0021-32583

Product Name: Quartz Shield / Liner Insert
Product Description: A high-purity fused quartz component serving as a protective shield or chamber liner. It contains plasma and process byproducts while being transparent to thermal radiation.
Technical Specifications:
  • Material: High-purity amorphous fused silica (quartz).

AMAT 0870-01002

Product Name: 5-Phase Stepper Motor Driver (Super Vexta UDX5114N)
Product Description: A high-performance bipolar 5-phase stepper motor drive, OEM branded for Applied Materials. It provides precise control for motion systems in semiconductor fabrication tools.
Technical Specifications:
  • Driver Type: Bipolar 5-phase stepper motor driver

AMAT 0010-30029

Product Name: P-Chuck Lift Assembly (Precision 5000)
Product Description: A complete electromechanical lift assembly for the pedestal chuck (P-Chuck) in AMAT Precision 5000 CVD systems. It controls the vertical elevation of the wafer chuck for processing and wafer transfer.
Technical Specifications:
  • Compatibility: Designed exclusively for AMAT Precision 5000 CVD platforms.

AMAT 0021-21984

Product Name: Ceramic Insulator / Isolation Ring
Product Description: A high-purity ceramic component designed for electrical isolation and structural support within semiconductor process chambers. It insulates powered electrodes from grounded chamber components while maintaining mechanical stability.
Technical Specifications:
  • Material: High-purity alumina (Al₂O₃) ceramic, offering exceptional dielectric strength.

AMAT 0010-70321

Product Name: Slit Valve Actuator / Door Assembly
Product Description: A complete electromechanical actuator assembly for operating slit valves or chamber doors in semiconductor vacuum systems. It provides reliable, repeatable motion for isolating process chambers during wafer transfer.
Technical Specifications:
  • Actuator Type: Pneumatic or servo-electric drive for precise positioning.

AMAT 0010-78170

Product Name: Integrated Circuit Board Assembly / Control Module
Product Description: A complex printed circuit board assembly (PCBA) that functions as a control, interface, or processing module within the semiconductor tool's electronic system. It manages I/O signals, communication, or subsystem control.
Technical Specifications:
  • Form Factor: Standard VME, cPCI, or proprietary AMAT backplane compatible.

AMAT 0200-35595

Product Name: Precision Process Ring/Insulator
Product Description: A high-performance ceramic or quartz component used as a ring, shield, or insulator within semiconductor process chambers. It provides electrical isolation, thermal stability, and protection against process byproducts.
Technical Specifications:
  • Material: High-purity quartz (fused silica) or advanced technical ceramic.

AMAT 3700-02322

Product Name: High-Performance O-Ring Seal
Product Description: A precision-molded elastomeric seal (O-Ring) for critical vacuum and fluid interfaces in semiconductor manufacturing equipment. It is designed for extreme reliability in harsh process conditions.
Technical Specifications:
  • Material: High-grade fluoroelastomer (e.g., Chemraz, Kalrez, or Viton) for extreme chemical resistance.

AMAT 0190-35857

Product Name: Thermal Control Subsystem Component
Product Description: A precision electronic or electromechanical component dedicated to temperature sensing, control, or regulation within semiconductor process modules. It is integral to maintaining stable thermal conditions during wafer processing.
Technical Specifications:
  • Operating Environment: Designed for high-vacuum, high-temperature, and corrosive gas environments.

AMAT 0200-18082

Product Name: Ceramic Center Nozzle (1.76L, HDPCVD)
Product Description: A high-purity ceramic nozzle designed for precise gas delivery in HDPCVD (High-Density Plasma Chemical Vapor Deposition) systems.
Technical Specifications:
  • Material: Ultra-high-purity, high-strength ceramic (Alumina or Aluminum Nitride).

AMAT 0190-21303

Product Name: RF Match Cable Assembly (Preclean 2, 0.5M)
Product Description: A specialized high-frequency RF (Radio Frequency) cable assembly designed for connecting RF match networks to process chambers in semiconductor pre-clean systems.
Technical Specifications:
  • Length: 0.5 meters.
  • Connector Type: High-performance, vacuum-compatible RF connectors (TRU-7684).

AMAT 0040-78440

Product Name: CMP Process Component (Titan Head Assembly Part)
Product Description: A precision mechanical component for the Titan Head assembly on Applied Materials' CMP equipment. It is a critical part of the wafer carrier and polishing interface system.
Technical Specifications:
  • Material: High-purity, machined engineering polymer or metal alloy for CMP compatibility.