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AMAT 0010-76706

Product Name: Safety Interlock Module
Product Description: A critical safety control module that monitors and enforces interlock conditions to protect personnel, wafers, and semiconductor equipment from hazardous operating conditions.
Technical Specifications:
  • Input Channels: 8 dual-channel safety interlock inputs

AMAT 0020-87570

Product Name: Wafer Lift Pin Assembly
Product Description: A precision-machined ceramic lift pin assembly used to elevate and position wafers within semiconductor processing chambers. It provides stable, non-contaminating wafer support during high-vacuum processes.
Technical Specifications:
  • Material: High-purity alumina ceramic

AMAT 3700-01893

Product Name: High-Performance O-Ring Seal
Product Description: A precision-engineered elastomeric seal designed for ultra-high vacuum applications in semiconductor processing equipment. It provides reliable sealing in harsh chemical and thermal environments.
Technical Specifications:
  • Material: DuPont Kalrez perfluoroelastomer compound

AMAT 0200-09557

Product Name: Quartz Focus Ring Assembly
Product Description: A high-purity quartz ring designed to focus and shape plasma in semiconductor etching chambers. It improves process uniformity and protects chamber components from plasma exposure.
Technical Specifications:
  • Material: High-purity synthetic fused silica

AMAT 0200-01955

Product Name: 200mm Deposition Ring Assembly
Product Description: A precision-machined annular component used in PVD deposition chambers to optimize thin-film uniformity across 200mm wafers. It provides a stable boundary for plasma confinement and material deposition.
Technical Specifications:
  • Wafer Compatibility: 200mm (8-inch) wafers

AMAT 0190-62183

Product Name: Capacitance Manometer Module
Product Description: A high-precision capacitance manometer designed for absolute pressure measurement in semiconductor vacuum processing systems. It provides stable and accurate pressure readings across a wide vacuum range.
Technical Specifications:
  • Measurement Range: 1 mTorr to 1000 Torr

AMAT 0190-09764

Product Name: Digital I/O Interface Module
Product Description: A high-density digital input/output module designed for reliable signal interfacing between semiconductor equipment control systems and field devices. It enables precise control and monitoring of discrete signals in advanced manufacturing environments.
Technical Specifications:
  • Input Channels: 16 optically isolated digital inputs

AMAT 0021-33836

Product Name: Ceramic Mounting Bracket
Product Description: A precision-formed ceramic structural component used for mounting, supporting, and isolating electrodes, sensors, and fixtures inside semiconductor vacuum process chambers.
Technical Specifications:
  • Material: High-purity macor ceramic or alumina

AMAT 0021-16858

Product Name: Quartz Shield Assembly
Product Description: A high-purity quartz protective component used to shield internal chamber parts from plasma exposure while maintaining optical transparency for process monitoring.
Technical Specifications:
  • Material: High-purity synthetic fused silica

AMAT 0021-00105

Product Name: Ceramic Insulation Washer
Product Description: A high-purity ceramic washer providing electrical insulation and mechanical spacing between conductive components in high-voltage and vacuum semiconductor environments.
Technical Specifications:
  • Material: High-purity alumina ceramic (Al₂O₃)

AMAT 0010-76440

Product Name: Analog Output Module
Product Description: A signal conditioning module that converts digital control signals into stable analog outputs for controlling process variables such as pressure, flow, and power in semiconductor tools.
Technical Specifications:
  • Output Signal Range: 0–10V, 4–20mA configurable

AMAT 0010-76097

Product Name: System Interlock Controller Module
Product Description: A safety control module that monitors critical system parameters and enforces interlock conditions to protect personnel, wafers, and semiconductor equipment during operation.
Technical Specifications:
  • Input Channels: Multiple digital safety interlock inputs