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AMAT 0010-40256 Vacuum Pump Interlock Module

Product Description: A safety control module designed to monitor vacuum pump operation and implement interlock logic in semiconductor processing equipment. It protects personnel and equipment by initiating safety protocols during pump faults.
Technical Specifications:
  • Input Channels: 4 pump status inputs (digital)
  • Output Channels: 8 relay outputs (2A @ 30V DC)
  • Power Supply: 24V DC, 8W

AMAT 0040-01839 Gas Manifold Block Assembly

Product Description: A precision-machined gas manifold block designed for distributing multiple process gases in semiconductor manufacturing equipment. It provides a compact, leak-tight solution for gas routing and mixing applications.
Technical Specifications:
  • Material: 316L electropolished stainless steel
  • Number of Ports: 8 ports (1/4" VCR connections)
  • Design Pressure: 250 PSIG

AMAT 0010-29958 Wafer Presence Sensor Assembly

Product Description: A non-contact optical sensor system designed for reliable detection of wafer presence in semiconductor handling equipment. It ensures accurate wafer detection without physical contact, preventing wafer damage and processing errors.
Technical Specifications:
  • Sensing Principle: Reflective infrared optical
  • Detection Range: 10–100mm

AMAT 0090-77041 RF Match Network Tuning Motor Assembly

Product Description: A precision stepper motor assembly designed for automatic tuning of RF match networks in plasma processing equipment. It provides precise, repeatable adjustment of match network components for optimal RF power transfer.
Technical Specifications:
  • Motor Type: Bipolar stepper motor (1.8° step angle)
  • Holding Torque: 1.2 N·m
  • Step Resolution: 0.001° (microstepping)

AMAT 0051-29503 Ultra-High-Purity Gas Filter Assembly

Product Description: A high-efficiency gas filtration assembly designed for removing particulates and contaminants from ultra-high-purity (UHP) process gases in semiconductor manufacturing. It ensures gas purity meets strict semiconductor process requirements. Technical Specifications:
  • Filter Type: PTFE membrane with 316L stainless steel housing
  • Filtration Rating: 0.003μm absolute

AMAT 0020-32991 Chamber Shield Assembly

Product Description: A high-purity ceramic shield designed to protect process chamber walls from plasma erosion and contamination in 200mm semiconductor processing equipment. It provides a chemically inert surface for advanced thin-film processes.
Technical Specifications:
  • Material: 99.6% high-purity alumina (Al₂O₃)
  • Density: > 3.9 g/cm³
  • Maximum Operating Temperature: 1700°C

AMAT 0140-00024 Digital I/O Module Assembly

Product Description: A high-density digital input/output module designed for interfacing between process equipment controllers and field devices in semiconductor manufacturing. It provides reliable signal conversion and isolation for control and monitoring applications.
Technical Specifications:
  • Input Channels: 16 optically isolated digital inputs (24V DC)
  • Output Channels: 16 relay outputs (2A @ 30V DC)

AMAT 0270-20152 Robot Calibration Tool Assembly

Product Description: A precision mechanical calibration tool designed for accurate alignment and calibration of wafer handling robots in semiconductor equipment. It ensures precise robot positioning, repeatability, and wafer centering to prevent processing errors.
Technical Specifications:
  • Material: 6061-T6 aluminum alloy (hard-anodized)
  • Wafer Compatibility: 200mm wafers
  • Positioning Accuracy: ±0.02mm

AMAT 0020-76062 Wafer Pedestal Heater Assembly

Product Description: A precision-engineered resistive heater assembly integrated into 200mm wafer pedestals, providing uniform, stable thermal control for semiconductor deposition and etching processes. It ensures consistent wafer temperature across the entire substrate surface.
Technical Specifications:
  • Heater Type: Dual-zone resistive heating element
  • Power Rating: 1200W total (600W per zone)
  • Voltage: 240V AC

AMAT 03-83191-00 Robot End-Effector Cable Harness Assembly

Product Description: A high-flex, shielded cable harness assembly engineered for reliable power and signal transmission between wafer handling robot controllers and end-effectors in semiconductor manufacturing equipment. It supports continuous dynamic motion while maintaining signal integrity in cleanroom environments.
Technical Specifications:
  • Conductor Material: Oxygen-free copper (OFC) with silver plating
  • Insulation: ETFE rated for 150°C continuous operation

AMAT 0100-00427 Vacuum Gauge Controller Module

Product Description: A high-precision vacuum gauge controller module designed for accurate measurement and control of vacuum levels in semiconductor processing equipment. It interfaces with various vacuum gauge types and provides real-time pressure data for process monitoring and control.
Technical Specifications:
  • Gauge Compatibility: Pirani, Penning, cold cathode, and ion gauges
  • Pressure Measurement Range: 1×10⁻⁹ Torr to 760 Torr (full vacuum range)

AMAT 0020-24534 Showerhead Gas Distribution Plate

Product Description: A precision-machined gas distribution showerhead plate designed for uniform gas delivery in semiconductor process chambers. It ensures consistent gas flow distribution across the wafer surface, critical for uniform thin-film deposition and etching processes.
Technical Specifications:
  • Material: 6061-T6 aluminum alloy (hard-anodized)
  • Diameter: 300mm (for 200mm wafer processing)