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AMAT 0140-08229

Product Name: Gas Flow Controller Module
Product Description: A high-precision mass flow controller designed to regulate the flow of process gases in semiconductor manufacturing with exceptional accuracy and repeatability.
Technical Specifications:
  • Flow Range: 0–1000 sccm

AMAT 0040-39042

Product Name: Chamber Liner Assembly
Product Description: A precision-machined protective liner installed inside semiconductor processing chambers to shield the main chamber body from plasma, chemical corrosion, and process byproduct accumulation.
Technical Specifications:
  • Material: 316L stainless steel with plasma-resistant coating

AMAT 0020-09999

Product Name: Ceramic Shield Assembly
Product Description: A high-purity ceramic shield designed to protect chamber components from plasma exposure and contamination in semiconductor processing environments.
Technical Specifications:
  • Material: High-purity alumina ceramic

AMAT 0110-00077

Product Name: RF Match Network Module
Product Description: A high-performance RF impedance matching network designed to optimize power transfer between RF generators and plasma loads in semiconductor etching and deposition systems.
Technical Specifications:
  • Frequency Range: 13.56 MHz

AMAT DIP-360-002

Product Name: Digital Panel Meter Module
Product Description: A high-precision LED digital panel meter designed for real-time display and monitoring of process parameters in semiconductor manufacturing equipment.
Technical Specifications:
  • Display: 3.5-digit LED, 14.3mm digit height

AMAT 0010-76706

Product Name: Safety Interlock Module
Product Description: A critical safety control module that monitors and enforces interlock conditions to protect personnel, wafers, and semiconductor equipment from hazardous operating conditions.
Technical Specifications:
  • Input Channels: 8 dual-channel safety interlock inputs

AMAT 0020-87570

Product Name: Wafer Lift Pin Assembly
Product Description: A precision-machined ceramic lift pin assembly used to elevate and position wafers within semiconductor processing chambers. It provides stable, non-contaminating wafer support during high-vacuum processes.
Technical Specifications:
  • Material: High-purity alumina ceramic

AMAT 3700-01893

Product Name: High-Performance O-Ring Seal
Product Description: A precision-engineered elastomeric seal designed for ultra-high vacuum applications in semiconductor processing equipment. It provides reliable sealing in harsh chemical and thermal environments.
Technical Specifications:
  • Material: DuPont Kalrez perfluoroelastomer compound

AMAT 0200-09557

Product Name: Quartz Focus Ring Assembly
Product Description: A high-purity quartz ring designed to focus and shape plasma in semiconductor etching chambers. It improves process uniformity and protects chamber components from plasma exposure.
Technical Specifications:
  • Material: High-purity synthetic fused silica

AMAT 0200-01955

Product Name: 200mm Deposition Ring Assembly
Product Description: A precision-machined annular component used in PVD deposition chambers to optimize thin-film uniformity across 200mm wafers. It provides a stable boundary for plasma confinement and material deposition.
Technical Specifications:
  • Wafer Compatibility: 200mm (8-inch) wafers

AMAT 0190-62183

Product Name: Capacitance Manometer Module
Product Description: A high-precision capacitance manometer designed for absolute pressure measurement in semiconductor vacuum processing systems. It provides stable and accurate pressure readings across a wide vacuum range.
Technical Specifications:
  • Measurement Range: 1 mTorr to 1000 Torr

AMAT 0190-09764

Product Name: Digital I/O Interface Module
Product Description: A high-density digital input/output module designed for reliable signal interfacing between semiconductor equipment control systems and field devices. It enables precise control and monitoring of discrete signals in advanced manufacturing environments.
Technical Specifications:
  • Input Channels: 16 optically isolated digital inputs