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AMAT 0050-37557

Product Name: Precision Gas Flow Restrictor Assembly
Product Description: A fixed-orifice flow restrictor designed to provide precise, stable gas flow regulation for low-flow process gas applications in semiconductor manufacturing.
Technical Specifications:
  • Material: 316L stainless steel (wetted parts)

AMAT 0040-33590

Product Name: 200mm Cathode Base Cooling Assembly
Product Description: A high-performance cooling base assembly that provides active thermal management for 200mm RF cathodes in PECVD chambers, maintaining stable process temperatures during high-power deposition.
Technical Specifications:
  • Material: 6061-T6 aluminum (hard-anodized)

AMAT 0050-34811

Product Name: Ultra-High-Purity Gas Weldment Manifold
Product Description: A precision-welded stainless steel manifold designed for distributing ultra-high-purity process gases to multiple process chambers, ensuring leak-tight, contamination-free gas delivery.
Technical Specifications:
  • Material: 316L VIM-VAR stainless steel (electropolished)

AMAT 0010-70162

Product Name: Slit Valve Actuator Assembly
Product Description: A precision pneumatic actuation assembly engineered to control the opening and closing of slit valves in semiconductor process chambers, ensuring vacuum isolation and reliable wafer passage between process modules.
Technical Specifications:
  • Actuation Type: Pneumatic, double-acting cylinder

AMAT 0020-00153

Product Name: Precision Bearing Guide
Product Description: A self-lubricating, high-precision bearing guide for linear motion assemblies, ensuring smooth, low-friction movement in wafer handling and positioning mechanisms.
Technical Specifications:
  • Material: 440C stainless steel (hardened)

AMAT 0015-09091

Product Name: Phasetronics P1038A 3-Phase Lamp Driver
Product Description: A high-power, 3-phase SCR-based lamp driver module designed to precisely control the power output to infrared (IR) heating lamps in semiconductor rapid thermal processing (RTP) systems.
Technical Specifications:
  • Input Voltage: 208V AC, 3-phase, 50/60Hz

AMAT 0050-40965

Product Name: Pressure Transmitter Module
Product Description: A high-precision, smart pressure transmitter for accurate, real-time measurement of absolute and gauge pressure in vacuum and gas delivery systems.
Technical Specifications:
  • Pressure Range: 0.1 Torr to 1000 Torr (absolute)

AMAT 0020-08633

Product Name: Stainless Steel Chamber Flange
Product Description: A precision-machined circular flange used to create vacuum-tight seals between chamber body segments, viewports, and feedthroughs in semiconductor process chambers.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0050-35629

Product Name: Precision Diaphragm Valve
Product Description: A high-purity, normally closed pneumatic diaphragm valve for precise on/off control of ultra-high-purity gases and chemicals in semiconductor process systems.
Technical Specifications:
  • Valve Type: Pneumatic, 2-way, normally closed

AMAT 0020-75908

Product Name: Ceramic Heater Shield
Product Description: A multi-layered, high-temperature ceramic shield designed to surround and insulate wafer heater pedestals, ensuring uniform thermal distribution and minimizing heat loss within the process chamber.
Technical Specifications:
  • Material: Aluminum nitride (AlN) ceramic

AMAT 0020-10527

Product Name: Quartz Chamber Liner
Product Description: A high-purity fused quartz cylindrical liner that lines the interior of semiconductor process chambers, protecting chamber walls from plasma damage and preventing metallic contamination.
Technical Specifications:
  • Material: Synthetic fused silica (SiO₂, >99.999% purity)

AMAT 0050-36604

Product Name: High-Purity Gas Filter Assembly
Product Description: A compact, ultra-high-purity (UHP) gas filtration unit designed to remove particulates and contaminants from specialty process gases in semiconductor gas delivery systems, ensuring wafer process integrity.
Technical Specifications:
  • Filter Type: PTFE membrane, 0.003μm absolute rating