Shop

You are here:
  1. Home
  2. Shop
  3. Page 62

AMAT 0040-08376

  • Product Name: Precision Bellows Assembly
  • Product Description: A multi-ply, flexible metal bellows assembly for vacuum motion feedthroughs, providing hermetic sealing while allowing linear or rotational movement.
  • Technical Specifications:
    • Material: 316L stainless steel, 10-ply convoluted design.

AMAT 0200-03264

  • Product Name: 150mm NCSR Outer Focus Ring
  • Product Description: A precision-machined outer focus ring for 150mm wafer electrostatic chucks, used to confine plasma and improve process uniformity at the wafer edge.
  • Technical Specifications:
    • Material: Silicon (Si) / Highly doped semiconductor grade silicon.

AMAT 0020-34985

  • Product Name: Ceramic Lift Pin Guide Assembly
  • Product Description: A precision ceramic guide and bushing assembly for wafer lift pins, ensuring smooth, vertical motion and electrical isolation in vacuum environments.
  • Technical Specifications:
    • Material: Machinable glass ceramic (Macor) / High-purity alumina.

AMAT 0040-90006

  • Product Name: Chamber Shield Liner Assembly
  • Product Description: A multi-piece, high-purity aluminum chamber shield/liner set that protects the chamber walls from deposition and plasma damage, ensuring process cleanliness.
  • Technical Specifications:
    • Material: 6061-T6 aluminum, hard-anodized (50μm thickness).

AMAT 0020-28357

  • Product Name: DC Bias Isolator Assembly
  • Product Description: A high-voltage ceramic isolator assembly that provides electrical isolation between the grounded chamber body and the DC-biased pedestal electrode.
  • Technical Specifications:
    • Material: 99.8% high-purity alumina (Al2O3) ceramic.

AMAT 0021-19281

  • Product Name: Quartz Gas Injector Liner
  • Product Description: A high-purity fused quartz liner for a radial gas injector, designed to deliver process gases uniformly while protecting the injector body from plasma exposure.
  • Technical Specifications:
    • Material: High-purity fused silica (quartz), > 99.99% SiO2.

AMAT 0041-49839

  • Product Name: Turbo Pump Adapter Flange
  • Product Description: A precision-machined adapter flange that provides a hermetic, high-vacuum seal between a turbomolecular pump and a semiconductor process chamber foreline.
  • Technical Specifications:
    • Material: 6061-T6 aluminum, hard-anodized finish.

AMAT 0010-42744

  • Product Name: Electrostatic Chuck (ESC) Heater Assembly
  • Product Description: A integrated resistive heater assembly embedded within an electrostatic chuck for precise wafer temperature control during semiconductor processing.
  • Technical Specifications:
    • Wattage: 1.2 kW, dual-zone independent control.

AMAT 0100-01765

  • Product Name: I/O Interface PCB Assembly (Reflexion CMP)
  • Product Description: A dedicated Printed Circuit Board that serves as the main input/output interface for the Reflexion series Chemical Mechanical Planarization (CMP) system.
  • Technical Specifications:
    • Form Factor: VME 6U rack-mountable.

AMAT 0020-76182

  • Product Name: High-Purity Gas Distribution Plate
  • Product Description: A precision-machined stainless steel plate designed for uniform distribution of ultra-high purity (UHP) process gases within semiconductor deposition chambers.
  • Technical Specifications:
    • Material: 316L VIM-VAR stainless steel, electropolished interior (Ra < 0.5 μm).

AMAT 0190-20015

  • Product Name: Digital Fiber Optic Transceiver Module
  • Product Description: A high-speed fiber optic communication module designed for reliable, long-distance, noise-immune data transmission in industrial control systems.
  • Technical Specifications:
    • Data Rate: Supports multi-rate operation up to 1 Gbps.

AMAT 0190-09488

  • Product Name: High-Purity Gas Filter Assembly
  • Product Description: A point-of-use gas filter designed to remove sub-micron particulates from high-purity process gases to maintain wafer cleanliness.
  • Technical Specifications:
    • Filtration Rating: High-efficiency 0.003 μm (3 nm) absolute rating.