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AMAT 0051-85514

  • Product Name: Pneumatic Valve Manifold Block
  • Product Description: Multi-station pneumatic valve manifold block for controlling pneumatic actuators in semiconductor tooling. It integrates multiple solenoid valves into a single, compact assembly.
  • Technical Specifications:
    • Valve Stations: 4-station manifold
    • Valve Type: 3/2-way, normally closed solenoid valves

AMAT 0041-49938

  • Product Name: Electrostatic Chuck (ESC) Insulator Ring
  • Product Description: High-performance dielectric insulator ring for electrostatic chuck assemblies. It provides electrical isolation between the chuck electrode and chamber ground while maintaining thermal stability.
  • Technical Specifications:
    • Material: Boron Nitride (BN) Ceramic Composite

AMAT 0041-38497

  • Product Name: Chamber Liner Assembly
  • Product Description: Precision-machined metallic chamber liner for semiconductor etch and deposition chambers. It protects the chamber body from process chemistry and defines the plasma reaction zone.
  • Technical Specifications:
    • Material: High-grade Aluminum Alloy (6061-T6)

AMAT 0040-84051

  • Product Name: 300mm Ceramic Heater Assembly
  • Product Description: High-performance ceramic heater for semiconductor wafer processing. It provides uniform, precise heating for wafer susceptors in high-vacuum deposition environments.
  • Technical Specifications:
    • Wafer Size: 300mm (12") compatible
    • Heating Element: Molybdenum embedded in alumina ceramic

AMAT 0021-23836

  • Product Name: Ceramic Shield Ring
  • Product Description: High-purity ceramic shield ring for plasma confinement and thermal protection in semiconductor process chambers. It shields chamber walls from direct plasma exposure and thermal stress.
  • Technical Specifications:
    • Material: 99.6% High-purity Alumina (Al₂O₃)
    • Dimensions: 300mm Outer Diameter (12")

AMAT 0015-00803

  • Product Name: Electrical Feedthrough Assembly
  • Product Description: Multi-pin electrical feedthrough for transmitting power and signals across vacuum chamber walls. It provides hermetic sealing and electrical isolation in ultra-high vacuum (UHV) environments.
  • Technical Specifications:
    • Pin Count: 12-pin configuration

AMAT 0010-00561

  • Product Name: Emission Detector Assembly
  • Product Description: Optical emission detector designed to monitor plasma light intensity and spectral emissions within semiconductor process chambers. It provides real-time feedback for plasma process control and endpoint detection.
  • Technical Specifications:
    • Detection Range: 200-1100 nm (UV to Near-IR)

AMAT 1270-01487

  • Product Name: Pressure Switch Assembly
  • Product Description: Pneumatic pressure switch for monitoring positive pressure in gas lines and pneumatic systems. Manufactured by Whitman Controls (Model P119G-25H-C12L) for Applied Materials.
  • Technical Specifications:
    • Pressure Range: 0-250 PSIG (0-17.2 Bar)
    • Set Point: Factory-calibrated at 100 PSIG (adjustable)

AMAT 0400-99747

  • Product Name: Gas Line Heater Control Unit
  • Product Description: A dedicated temperature controller designed to maintain precise heating of gas lines and manifolds, preventing condensation or freezing of process gases. Manufactured by Buckles-Smith for Applied Materials.
  • Technical Specifications:
    • Model: VAS104350-0938
    • Input Voltage: 100-240V AC, 50/60Hz

AMAT 0050-49204

  • Product Name: Gas Manifold Assembly
  • Product Description: Precision-engineered multi-port gas distribution manifold for semiconductor process gas delivery systems. It ensures stable, contamination-free routing of process and purge gases within semiconductor fabrication chambers.
  • Technical Specifications:
    • Material: 316L Electropolished Stainless Steel

AMAT 0090-20298

  • Product Name: RF Match Back Cover Fan Assembly
  • Product Description: A cooling fan assembly integrated into the back cover of an RF Match network, providing forced-air cooling to maintain optimal operating temperatures.
  • Technical Specifications:
    • Fan Type: High-static pressure, brushless DC fan

AMAT 0240-08239

  • Product Name: Retrofit / Upgrade Kit
  • Product Description: A comprehensive kit designed to upgrade or modify specific functions of a semiconductor process chamber, improving performance or extending service life.
  • Technical Specifications:
    • Components: Custom mix of mechanical, electrical, and pneumatic parts
    • Compatibility: Engineered for specific chamber types (e.g., load cup, cone, bellows)