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AMAT 0020-89739

Product Name: Ceramic Insulator / Shield Assembly
Product Description: High-performance electrically insulating component for semiconductor process chambers.
Technical Specifications:
  • Material: High-purity alumina (Al₂O₃) ceramic
  • Excellent thermal stability and dielectric strength

AMAT 0041-32713

Product Name: Shower Head Gen 2.1 ENP Siconi Producer GT
Product Description: High-precision gas distribution showerhead designed for semiconductor thin-film deposition processes.
Technical Specifications:
  • Compatible with 200mm/300mm wafer processing platforms
  • Material: High-purity anodized aluminum alloy

AMAT 0100-09081

  • Product Name: Serial Communication PCB Assembly
  • Product Description: High-speed serial communication printed circuit board designed for data transmission between system controllers and peripheral devices in semiconductor manufacturing tools. It provides reliable RS-485/RS-232 communication in industrial EMI environments.
  • Technical Specifications:
    • Form Factor: Standard VME 6U PCB

AMAT 0090-20042

  • Product Name: Pneumatic Manifold Kit for MFC
  • Product Description: Complete pneumatic manifold kit designed for precise control of gas delivery to mass flow controllers (MFCs) in semiconductor gas distribution systems. It includes all necessary fittings, valves, and tubing for reliable gas line operation.
  • Technical Specifications:
    • Configuration: 2-gas output manifold

AMAT 0041-35140

  • Product Name: 300mm Chamber Shield Assembly
  • Product Description: One-piece, high-purity ceramic chamber shield designed to protect 300mm process chamber walls from plasma erosion. It defines the plasma reaction zone and ensures process uniformity across large-diameter wafers.
  • Technical Specifications:
    • Material: 99.6% High-Purity Alumina (Al₂O₃)

AMAT 0020-34831

  • Product Name: RF/HV Mounting Plate with Interlock
  • Product Description: Integrated mounting plate for RF/high-voltage components featuring built-in safety interlock mechanisms. It secures high-voltage assemblies while providing interlock signals to ensure operator safety during maintenance.
  • Technical Specifications:
    • Material: 6061-T6 Aluminum Alloy

AMAT 0020-34731

  • Product Name: RF/HV Feedthrough Mount Plate
  • Product Description: Machined metal mounting plate designed to secure high-voltage (HV) and radio frequency (RF) feedthroughs to semiconductor process chamber walls. It provides a stable, grounded interface with precision alignment for reliable electrical performance.
  • Technical Specifications:
    • Material: 316L Stainless Steel

AMAT 0020-10059

  • Product Name: 200mm Wafer Lift Ring
  • Product Description: Precision-machined metal lift ring designed to interface with wafer lift pins, providing stable and secure support for 200mm wafers during vertical transfer in semiconductor process chambers. It ensures precise wafer alignment for robot pick-and-place operations.
  • Technical Specifications:
    • Material: 6061-T6 Aluminum Alloy

AMAT 0020-06203

  • Product Name: Ceramic Isolator Cylinder
  • Product Description: High-purity alumina ceramic cylinder providing electrical isolation and structural support for high-voltage components within semiconductor process chambers. It delivers robust insulation in RF and plasma-rich environments while maintaining ultra-high vacuum compatibility.
  • Technical Specifications:
    • Material: 99.6% High-Purity Alumina (Al₂O₃)

AMAT 0020-06998

  • Product Name: Insulator Ring (DC Bias)
  • Product Description: Precision-machined ceramic ring providing DC bias isolation between the electrode and chamber ground in PVD chambers.
  • Technical Specifications:
    • Material: Boron nitride (BN) ceramic composite

AMAT 0020-03398

  • Product Name: Ceramic Chamber Shield
  • Product Description: High-purity alumina ceramic shield for protecting chamber walls from plasma exposure in reactive ion etching processes.
  • Technical Specifications:
    • Material: 99.6% high-purity alumina (Al₂O₃)

AMAT 0020-03004

  • Product Name: Quartz Viewport Protector
  • Product Description: Fused quartz protective window for chamber viewports, shielding optical sensors and cameras from process plasma and contamination while maintaining optical transparency.
  • Technical Specifications:
    • Material: High-purity fused silica quartz