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AMAT 0010-52595

  • Product Name: 300mm Wafer Lift Pin Assembly
  • Product Description: A precision-engineered lift pin assembly for vertically positioning 300mm wafers during transport and processing in high-vacuum chambers.
  • Technical Specifications:
    • Material: Silicon carbide (SiC) ceramic pin, 316L stainless steel base.

AMAT 3004-332-5M

  • Product Name: Servo Motor Power Cable Assembly (5m)
  • Product Description: A heavy-duty, shielded power cable assembly designed for connecting servo drives to motors in precision motion control systems.
  • Technical Specifications:
    • Length: 5 meters.

AMAT 0090-05154

  • Product Name: MaxFilter-II Particulate Filter Assembly
  • Product Description: A compact, high-efficiency particulate filter assembly designed for removing sub-micron contaminants from air and gas lines in semiconductor tool interfaces.
  • Technical Specifications:
    • Filtration Rating: 0.1 μm absolute efficiency.

AMAT 233-2700-26

  • Product Name: Stainless Steel Focus Ring Clamp
  • Product Description: A precision-machined annular clamp designed to securely fasten focus rings and shield components in semiconductor process chambers.
  • Technical Specifications:
    • Material: 316L stainless steel, electropolished finish.

AMAT 0010-30528

  • Product Name: ESC (Electrostatic Chuck) RF Insert Assembly
  • Product Description: A high-voltage RF feedthrough assembly integrated into an electrostatic chuck, providing RF power coupling while maintaining vacuum integrity and electrical isolation.
  • Technical Specifications:
    • Voltage Rating: 5 kV RF (13.56 MHz).

AMAT 0100-90831

  • Product Name: Field Control Processor Module
  • Product Description: A high-performance, modular field controller designed for real-time control and monitoring of peripheral devices in semiconductor manufacturing systems.
  • Technical Specifications:
    • Memory: 16 MB SDRAM, 32 MB Flash memory.

AMAT 0051-16219

  • Product Name: Pneumatic Solenoid Valve Manifold
  • Product Description: A multi-station pneumatic manifold assembly integrating high-purity solenoid valves for controlling gas flow in semiconductor process gas panels.
  • Technical Specifications:
    • Valves: 8-station manifold with 2-position, 3-way normally closed solenoid valves.

AMAT 0010-10721

  • Product Name: 200mm Heater Pedestal Assembly
  • Product Description: A high-precision, resistively heated pedestal assembly designed for supporting and uniformly heating 200mm wafers in semiconductor vacuum process chambers.
  • Technical Specifications:
    • Wafer Compatibility: 200mm (8-inch) wafers.

AMAT 0040-08376

  • Product Name: Precision Bellows Assembly
  • Product Description: A multi-ply, flexible metal bellows assembly for vacuum motion feedthroughs, providing hermetic sealing while allowing linear or rotational movement.
  • Technical Specifications:
    • Material: 316L stainless steel, 10-ply convoluted design.

AMAT 0200-03264

  • Product Name: 150mm NCSR Outer Focus Ring
  • Product Description: A precision-machined outer focus ring for 150mm wafer electrostatic chucks, used to confine plasma and improve process uniformity at the wafer edge.
  • Technical Specifications:
    • Material: Silicon (Si) / Highly doped semiconductor grade silicon.

AMAT 0020-34985

  • Product Name: Ceramic Lift Pin Guide Assembly
  • Product Description: A precision ceramic guide and bushing assembly for wafer lift pins, ensuring smooth, vertical motion and electrical isolation in vacuum environments.
  • Technical Specifications:
    • Material: Machinable glass ceramic (Macor) / High-purity alumina.

AMAT 0040-90006

  • Product Name: Chamber Shield Liner Assembly
  • Product Description: A multi-piece, high-purity aluminum chamber shield/liner set that protects the chamber walls from deposition and plasma damage, ensuring process cleanliness.
  • Technical Specifications:
    • Material: 6061-T6 aluminum, hard-anodized (50μm thickness).