Digital guide

You are here:
  1. Home
  2. AMAT
  3. AMAT 0020-26578

AMAT 0020-26578

  • Product Name: Clamp Ring, Chamber Liner
  • Product Description: A robust mechanical clamping ring designed to secure chamber liners and shields in high-vacuum semiconductor processing environments.
  • Technical Specifications:
    • Material: Anodized aluminum alloy 6061-T6
WhatApp
WeChat

Detailed content

    • Diameter: 345mm (for 200mm chamber applications)
    • Hardness: 65-75 HRC after heat treatment
    • Fastener Compatibility: M6 socket head cap screws
  • Functional Features:
    • Provides uniform circumferential clamping force
    • Prevents liner movement during process pressure cycling
    • Resists corrosion from process chemistries
    • Designed for repeated installation and removal without deformation
    • Precision machined for perfect alignment with chamber components
  • Application Scenarios:
    • Used in AMAT Producer SE and Centura thermal processing chambers
    • Applied in low-pressure chemical vapor deposition (LPCVD) systems
    • Deployed in oxide and nitride deposition processes
    • Utilized in high-temperature furnace applications

You may also like