Digital guide
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AMAT 0021-11297
- Product Name: Assembly, Heater Jacket
- Product Description: An insulated heating assembly designed to maintain precise temperatures on chamber components in semiconductor processing equipment.
- Technical Specifications:
- Heating Element: Nichrome resistance wire with high-temperature insulation
Detailed content
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- Power Rating: 800W at 240V AC
- Temperature Range: Ambient to 350°C
- Insulation Material: Ceramic fiber with low outgassing properties
- Dimensions: Custom-fitted for specific chamber geometry
- Functional Features:
- Provides uniform heat distribution across component surface
- Low outgassing design suitable for UHV environments
- Integrated thermal sensors for precise temperature control
- Resistant to process chemicals and vacuum conditions
- Easy installation with quick-connect electrical fittings
- Application Scenarios:
- Used in AMAT DPS (Decoupled Plasma Source) etch chambers
- Applied in process gas line heating applications
- Deployed in chamber wall temperature maintenance
- Utilized in semiconductor manufacturing processes requiring thermal stability
- Suitable for high-purity processing environments
