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AMAT 0020-38890

Product Name: DPS Cathode Chamber Cover
Product Description: A heavy-duty, precision-machined aluminum cover that forms the top closure of the DPS (Dielectric Plasma Etch) chamber. It provides a vacuum-tight seal, houses the upper electrode feedthrough, and supports the showerhead assembly.
Technical Specifications:
  • Material: Forged 6061-T6 aluminum alloy

AMAT 0200-36524

Product Name: High-Purity Quartz Gas Distribution Nozzle
Product Description: A precision-formed fused quartz nozzle that delivers process gases directly to the wafer edge. It ensures uniform gas flow and prevents thermal shock to the wafer edge during high-temperature deposition.
Technical Specifications:
  • Material: High-purity synthetic fused silica (SiO₂ > 99.998%)

AMAT 0021-17725

Product Name: 200mm ESC Shutter Disk Assembly
Product Description: A precision-machined disk shutter designed to protect the 200mm Electrostatic Chuck (ESC) surface from plasma exposure, particle contamination, and physical damage during wafer transfer, idle states, and maintenance procedures.
Technical Specifications:
  • Material: High-purity 6061-T6 aluminum alloy

AMAT 0020-31292

Product Name: Gas Distribution Manifold / Injector Assembly
Product Description: A multi-channel precision manifold that mixes and distributes multiple process gases to the chamber showerhead. It ensures precise gas ratios and uniform dispersion for stable deposition/etch processes.
Technical Specifications:
  • Material: Electropolished 316L stainless steel

AMAT 1059-59425

Product Name: High-Frequency RF Cable Assembly (Low-Loss)
Product Description: A high-performance, shielded RF coaxial cable assembly designed for transmitting high-power RF signals between the RF generator and process chamber matching network.
Technical Specifications:
  • Cable Type: Low-loss, flexible 50Ω coaxial (RG-214 equivalent)

AMAT 0227-05442

Product Name: Precision Bellows Assembly (Linear Motion)
Product Description: A multi-ply, flexible metal bellows assembly that provides hermetic vacuum sealing for linear motion components (e.g., lift pins, gate valves). It allows axial movement while maintaining UHV integrity.
Technical Specifications:
  • Material: 316L stainless steel (multi-ply convoluted)

AMAT 0020-96815

Product Name: Lower Chamber Shield / Deposition Baffle
Product Description: A one-piece, cylindrical aluminum shield installed in the lower chamber section. It protects the chamber base and pump port from coating buildup and optimizes gas flow dynamics.
Technical Specifications:
  • Material: High-purity 6061-T6 aluminum

AMAT 0021-08845

Product Name: Wedge Post / Spider Assembly (Wafer Support)
Product Description: A multi-leg, ceramic-coated metallic assembly that supports the wafer edge during high-temperature processes. It provides stable, low-contact wafer support and allows for uniform thermal transfer.
Technical Specifications:
  • Material: Stainless steel core with high-purity alumina coating

AMAT 0021-37887

Product Name: Upper Electrode / Showerhead Faceplate (300mm)
Product Description: A precision-machined, high-purity aluminum faceplate that forms the lower surface of the upper electrode assembly. It features a uniform pattern of gas holes to distribute process gases evenly across the 300mm wafer.
Technical Specifications:
  • Material: High-purity 6061-T6 aluminum alloy

AMAT 0020-27093

Product Name: Ceramic Insulator Washer (Lifter Pin Assembly)
Product Description: A high-purity ceramic washer used as an electrical insulator and spacer in wafer lift pin assemblies. It provides electrical isolation between the metallic lift pin guide and the chamber body.
Technical Specifications:
  • Material: 99.6% high-purity alumina (Al₂O₃)

AMAT 0200-02730

Product Name: 200mm Quartz Focus Ring/Shield Assembly
Product Description: A high-purity fused quartz component that surrounds the wafer pedestal. It focuses plasma towards the wafer, protects the chamber wall, and ensures uniform plasma distribution across the 200mm wafer surface.
Technical Specifications:
  • Material: High-purity synthetic fused silica (quartz, >99.998% SiO₂)

AMAT 3880-01288

Product Name: Flat Washer, Precision Stainless Steel
Product Description: A high-precision, flat washer engineered for use in ultra-high vacuum (UHV) assemblies. It provides uniform load distribution, prevents galling, and maintains precise spacing between critical components.
Technical Specifications:
  • Material: 316L stainless steel (vacuum arc remelted)