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AMAT 3500-01078 Wafer Handling Robot Arm Assembly

Product Description: A high-precision robotic arm designed for automated wafer handling in semiconductor manufacturing equipment. It transfers 200mm or 300mm wafers between load ports, cassettes, pre-aligners, and process chambers with exceptional accuracy and repeatability. The arm is engineered for cleanroom compatibility, low particle generation, and reliable operation in UHP vacuum environments.
Technical Specifications:
- Wafer Compatibility: 200mm and 300mm wafers (configurable)
- Reach: 500mm (maximum horizontal reach)

AMAT 3700-02478 UHP Gas Filter Housing Assembly

Product Description: A rugged, leak-tight filter housing designed for ultra-high-purity gas filtration in semiconductor manufacturing. It houses disposable filter elements to remove sub-micron particulates and contaminants from process gases, ensuring gas purity meets the strict requirements of advanced semiconductor processes. The housing is engineered for UHP compatibility, easy filter replacement, and long-term reliability in harsh fab environments.
Technical Specifications:
- Material: 316L electropolished stainless steel
- Filter Compatibility: 0.003μm to 1μm absolute PTFE or ceramic filter elements

AMAT 0190-17469 Industrial UV Lamp Assembly

Product Description: A high-intensity ultraviolet (UV) lamp assembly designed for plasma generation and photoresist curing in semiconductor manufacturing equipment. It emits high-power UV radiation (200–400 nm) to initiate plasma reactions or cure photoresist films on wafers, ensuring consistent process performance and high throughput. The lamp is engineered for long life, stable output, and compatibility with AMAT process chambers.
Technical Specifications:
- Lamp Type: Mercury-xenon (Hg-Xe) arc lamp
- Power Rating: 1500W

AMAT 3700-01390 High-Pressure Gas Regulator Assembly

Product Description: A precision high-pressure gas regulator designed for controlling the pressure of ultra-high-purity process gases in semiconductor manufacturing. It reduces high-pressure gas from cylinder or bulk supply to a stable, low-pressure output suitable for process chamber use, ensuring consistent gas flow and pressure stability. The regulator is engineered for UHP compatibility, low outgassing, and resistance to aggressive process chemistries.
Technical Specifications:
- Input Pressure Range: 0–3000 PSIG
- Output Pressure Range: 0–250 PSIG (adjustable)

AMAT 0100-20100 Process Chamber Control Board

Product Description: A high-performance printed circuit board (PCB) designed for centralized control and monitoring of semiconductor process chamber operations. It integrates multiple control functions, including temperature, pressure, gas flow, and plasma parameters, to ensure consistent process performance and repeatability. The board communicates with the main equipment controller and field devices, providing real-time data and enabling remote diagnostics.
Technical Specifications:
- Processor: 32-bit ARM Cortex-M7 microcontroller (180 MHz)
- Memory: 32MB SDRAM, 64MB Flash

AMAT 0020-70336

Product Description: A high-precision electrostatic chuck assembly designed for 300mm wafer clamping and thermal control in advanced semiconductor processing equipment. It uses Coulombic electrostatic force to securely hold wafers during deposition, etching, and annealing processes, while providing uniform temperature distribution across the wafer surface. The ESC is engineered for ultra-clean operation, low particle generation, and compatibility with UHP vacuum environments.
Technical Specifications:
- Wafer Compatibility: 300mm (12-inch) silicon wafers
- Chuck Type: Coulombic electrostatic chuck (ESC)
- Clamping Voltage: 0–3500V DC (adjustable)

AMAT 0090-02847 RF Match Network Capacitor Assembly

Product Description: A high-performance variable capacitor assembly designed for automatic tuning of RF match networks in semiconductor plasma processing equipment. It provides precise impedance adjustment to ensure maximum RF power transfer from the generator to the process chamber, optimizing plasma stability and process repeatability. The capacitor is engineered to withstand high RF power, harsh process environments, and continuous tuning cycles.
Technical Specifications:
- Capacitance Range: 10 pF to 100 pF (adjustable)
- RF Frequency Range: 400 kHz to 60 MHz

AMAT 0040-06315

Product Description: A precision-machined, leak-tight gas manifold block engineered for centralized routing and distribution of ultra-high-purity process gases in semiconductor manufacturing equipment. It serves as a critical connection hub for multiple gas lines, ensuring contamination-free, consistent gas delivery to process chambers while optimizing space in gas panels and sub-fab installations. The manifold is designed to eliminate dead legs and minimize particle generation, meeting the strict purity requirements of advanced semiconductor processes.
Technical Specifications:
- Material: 316L electropolished stainless steel (EP finish)
- Surface Finish: Ra < 0.4 μm (internal and external) for UHP compatibility

AMAT 0010-40256 Vacuum Pump Interlock Module

Product Description: A safety control module designed to monitor vacuum pump operation and implement interlock logic in semiconductor processing equipment. It protects personnel and equipment by initiating safety protocols during pump faults.
Technical Specifications:
  • Input Channels: 4 pump status inputs (digital)
  • Output Channels: 8 relay outputs (2A @ 30V DC)
  • Power Supply: 24V DC, 8W

AMAT 0040-01839 Gas Manifold Block Assembly

Product Description: A precision-machined gas manifold block designed for distributing multiple process gases in semiconductor manufacturing equipment. It provides a compact, leak-tight solution for gas routing and mixing applications.
Technical Specifications:
  • Material: 316L electropolished stainless steel
  • Number of Ports: 8 ports (1/4" VCR connections)
  • Design Pressure: 250 PSIG

AMAT 0010-29958 Wafer Presence Sensor Assembly

Product Description: A non-contact optical sensor system designed for reliable detection of wafer presence in semiconductor handling equipment. It ensures accurate wafer detection without physical contact, preventing wafer damage and processing errors.
Technical Specifications:
  • Sensing Principle: Reflective infrared optical
  • Detection Range: 10–100mm

AMAT 0090-77041 RF Match Network Tuning Motor Assembly

Product Description: A precision stepper motor assembly designed for automatic tuning of RF match networks in plasma processing equipment. It provides precise, repeatable adjustment of match network components for optimal RF power transfer.
Technical Specifications:
  • Motor Type: Bipolar stepper motor (1.8° step angle)
  • Holding Torque: 1.2 N·m
  • Step Resolution: 0.001° (microstepping)