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AMAT 0040-01839 Gas Manifold Block Assembly
Product Description: A precision-machined gas manifold block designed for distributing multiple process gases in semiconductor manufacturing equipment. It provides a compact, leak-tight solution for gas routing and mixing applications.
Technical Specifications:
- Material: 316L electropolished stainless steel
- Number of Ports: 8 ports (1/4″ VCR connections)
- Design Pressure: 250 PSIG
Detailed content
- Operating Temperature: -40°C to +120°C
- Leak Rate: < 1×10⁻⁹ atm·cc/s He
- Surface Finish: Electropolished (Ra < 0.4μm)
- Dimensions: 150mm × 100mm × 50mm
- Weight: 2.5 kg
- Compliance: SEMI C12, RoHS
Functional Features:
- Zero dead-leg design eliminates gas trapping and contamination
- Electropolished surfaces minimize particle generation
- Precision-drilled channels for uniform gas distribution
- Compact design for space-efficient installation
- Compatible with all UHP semiconductor process gases
- Pre-fabricated for quick installation
- Fully passivated for immediate UHP service deployment
Application Scenarios:
- Multi-gas distribution in CVD and ALD chambers
- Gas mixing manifolds for specialty process recipes
- Purge gas distribution systems
- Gas panel manifold assemblies
- Sub-fab gas distribution networks
