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AMAT 0242-21729

Product Name: Electrostatic Chuck (ESC) RF Interface Module
Product Description: A dedicated electronic interface module that conditions and delivers RF power to the electrostatic chuck (ESC) for wafer clamping. It ensures stable, low-noise RF biasing and provides fault monitoring for the ESC system.
Technical Specifications:
  • RF Frequency: 13.56 MHz (fixed)

AMAT 0240-24300

Product Name: Centura Front-End MUT Interface Kit
Product Description: A complete mechanical upgrade kit for the front-end interface of AMAT Centura platforms. It includes precision components to enhance wafer transfer reliability, alignment accuracy, and vacuum integrity between the load lock and process modules.
Technical Specifications:
  • Kit Contents: Precision alignment brackets, bellows assemblies, linear guides, seal kits, and mounting hardware

AMAT 0040-32530

Product Name: Cold Plate / Liquid Cooling Assembly

Product Description: A high-performance liquid-cooled heat exchanger designed for efficient thermal management of high-power components, electrostatic chucks (ESC), and process modules. Provides precise, closed-loop temperature control.
Technical Specifications:
  • Material: Oxygen-free copper (OFC) or aluminum alloy

AMAT DAS200-2

Product Name: DAS-200 Data Acquisition & Serial Interface Module

Product Description: An industrial-grade printed circuit board (PCB) module that manages high-speed serial communication, analog/digital data acquisition, and I/O control between the system controller and peripheral process modules.
Technical Specifications:
  • Processor: 32-bit RISC industrial microcontroller

AMAT 0040-01784

Product Name: Chamber Body / Vacuum Enclosure Section
Product Description: A heavy-duty, precision-machined main chamber body that forms the structural core of the semiconductor process module. It provides a vacuum-tight vessel, mounting interface for all internal components, and structural rigidity.
Technical Specifications:
  • Material: Forged 6061-T6 aluminum alloy or 316L stainless steel

AMAT 0200-09809

Product Name: Quartz Chamber Liner / Wrap-Around Shield

Product Description: A high-purity fused quartz cylindrical liner that lines the process chamber wall. It provides a chemically inert barrier, protects the chamber from plasma damage, and maintains thermal uniformity.
Technical Specifications:
  • Material: High-purity synthetic fused silica (quartz)

AMAT 0200-01371

Product Name: Ceramic Membrane Electrode Assembly (200mm Dual-Cell ECP)
Product Description: A high-purity ceramic membrane component used in electrochemical plasma (ECP) processes. It acts as a dielectric barrier, facilitates uniform plasma generation, and provides electrical isolation between process electrodes.
Technical Specifications:
  • Material: 99.9% high-purity alumina (Al₂O₃) ceramic

AMAT 0021-97309

Product Name: ESC (Electrostatic Chuck) Disk Shutter Assembly

Product Description: A precision-machined aluminum shutter mechanism that physically protects the electrostatic chuck surface from contamination, plasma exposure, and physical damage during wafer exchange, idle periods, and maintenance.
Technical Specifications:
  • Material: High-purity 6061-T6 aluminum alloy

AMAT 0270-20296

Product Name: Precision Calibration & Alignment Tool Kit
Product Description: A specialized tool kit designed for the precise alignment, calibration, and maintenance of critical chamber components, such as electrostatic chucks (ESC), gas delivery nozzles, and wafer handling mechanisms. Ensures optimal equipment performance and process repeatability.
Technical Specifications:
  • Material: Hardened tool steel, anodized aluminum, and ceramic gauge pins

AMAT 0010-17814

Product Name: Multi-Zone Heater Element / Cartridge Assembly
Product Description: A high-wattage, mineral-insulated (MI) cartridge heater designed for embedded installation in wafer pedestals and heat exchangers. Provides uniform, high-power heating for semiconductor process thermal control.
Technical Specifications:
  • Element: Nickel-chromium (NiCr) resistance wire

AMAT 1400-00206

Product Name: Optical Reference Sensor / Position Detector
Product Description: A non-contact optical sensor used for precise position detection of robot blades, wafer doors, and linear stages. Provides high-resolution, repeatable position feedback for motion control systems.
Technical Specifications:
  • Type: Reflective photoelectric sensor

AMAT 0010-02258

Product Name: Heater Pedestal Base / ESC Support Assembly
Product Description: A precision-machined metal base that supports the wafer heater/ESC pedestal, provides thermal isolation, and integrates coolant passages for temperature regulation. It ensures mechanical stability and efficient heat transfer.
Technical Specifications:
  • Material: Titanium alloy or oxygen-free copper (OFC)