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AMAT 1037-53108

Product Description: A high-precision, custom-machined metal component used as a structural support or adapter within the tool's chamber or frame assembly.
Technical Specifications:
  • Material: High-grade aluminum alloy or stainless steel
  • Tolerance: Precision machining to ±0.001mm

AMAT 0010-09035

Product Name: ESC (Electrostatic Chuck) Interface Module
Product Description: A dedicated control module that interfaces between the system controller and the Electrostatic Chuck (ESC), providing the necessary high-voltage and control signals.
Technical Specifications:
  • Output Voltage: Programmable high-voltage DC (up to kilovolt range)

AMAT 0100-01222

Product Name: 4-Port UPA INTC PCB Assembly

Product Description: A printed circuit board assembly (PCBA) serving as a 4-port Universal Port Array (UPA) controller for the Reflexion CMP system.
Technical Specifications:
  • Type: Multi-channel I/O interface PCB

AMAT 0010-00557

Product Name: Phase / Magnetic Detector Assembly
Product Description: An electronic sensor assembly designed to detect phase angles or magnetic field changes for position and speed feedback in precision motion systems.
Technical Specifications:
  • Type: Non-contact magnetic/phase detection
  • Supply Voltage: 24V DC

AMAT 0050-38614

Product Name: Precision Gas Line Assembly
Product Description: A pre-fabricated, bent and welded stainless steel tubing assembly for direct gas line connections in semiconductor tools.
Technical Specifications:
  • Material: Seamless 316L electropolished stainless steel tubing

AMAT 0200-35113

Product Name: 200mm EPI R3 Rotation Susceptor

Product Description: A rotating wafer support component (susceptor) designed for 200mm Epitaxial (EPI) deposition processes.
Technical Specifications:
  • Diameter: 200mm (8-inch) wafer compatible

AMAT 0140-16621

Product Name: Cable Harness Assembly
Product Description: A custom-built, multi-conductor cable assembly for transmitting signals and power between electronic modules in semiconductor tools.
Technical Specifications:
  • Conductors: High-stranded, tinned copper wires

AMAT 0050-30838

Product Name: Valve Manifold Assembly
Product Description: A precision-manufactured gas distribution and control manifold designed for semiconductor process equipment. It integrates multiple valves and channels to regulate the flow of process gases with high accuracy.
Technical Specifications:
  • Material: High-purity 316L stainless steel

AMAT 0010-70415

Product Name: Ceramic Heater Ring Assembly
Product Description: High-temperature ceramic heater ring for thermal process applications in semiconductor chambers.
Technical Specifications:
  • Material: Alumina ceramic (Al₂O₃) with tungsten heating elements
  • Diameter: 200mm

AMAT 0010-20498

Product Name: ±15V DC Power Supply Module

Product Description: Dual-output regulated power supply for analog control systems in semiconductor equipment.
Technical Specifications:
  • Input Voltage: 100-240V AC (50/60Hz)

AMAT 0050-36334

Product Name: Pneumatic Solenoid Valve Manifold
Product Description: Multi-station pneumatic valve manifold for automated control of gas delivery systems.
Technical Specifications:
  • Configuration: 4-station manifold assembly
  • Valve Type: 3-way normally closed solenoid valves

AMAT 0010-16804

Product Name: RF Filter Assembly
Product Description: High-performance RF interference filter for signal conditioning in semiconductor control systems.
Technical Specifications:
  • Frequency Range: 10kHz-100MHz
  • Attenuation: ≥60dB at 13.56MHz