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AMAT 0020-34831

  • Product Name: RF/HV Mounting Plate with Interlock
  • Product Description: Integrated mounting plate for RF/high-voltage components featuring built-in safety interlock mechanisms. It secures high-voltage assemblies while providing interlock signals to ensure operator safety during maintenance.
  • Technical Specifications:
    • Material: 6061-T6 Aluminum Alloy

AMAT 0020-34731

  • Product Name: RF/HV Feedthrough Mount Plate
  • Product Description: Machined metal mounting plate designed to secure high-voltage (HV) and radio frequency (RF) feedthroughs to semiconductor process chamber walls. It provides a stable, grounded interface with precision alignment for reliable electrical performance.
  • Technical Specifications:
    • Material: 316L Stainless Steel

AMAT 0020-10059

  • Product Name: 200mm Wafer Lift Ring
  • Product Description: Precision-machined metal lift ring designed to interface with wafer lift pins, providing stable and secure support for 200mm wafers during vertical transfer in semiconductor process chambers. It ensures precise wafer alignment for robot pick-and-place operations.
  • Technical Specifications:
    • Material: 6061-T6 Aluminum Alloy

AMAT 0020-06203

  • Product Name: Ceramic Isolator Cylinder
  • Product Description: High-purity alumina ceramic cylinder providing electrical isolation and structural support for high-voltage components within semiconductor process chambers. It delivers robust insulation in RF and plasma-rich environments while maintaining ultra-high vacuum compatibility.
  • Technical Specifications:
    • Material: 99.6% High-Purity Alumina (Al₂O₃)

AMAT 0020-06998

  • Product Name: Insulator Ring (DC Bias)
  • Product Description: Precision-machined ceramic ring providing DC bias isolation between the electrode and chamber ground in PVD chambers.
  • Technical Specifications:
    • Material: Boron nitride (BN) ceramic composite

AMAT 0020-03398

  • Product Name: Ceramic Chamber Shield
  • Product Description: High-purity alumina ceramic shield for protecting chamber walls from plasma exposure in reactive ion etching processes.
  • Technical Specifications:
    • Material: 99.6% high-purity alumina (Al₂O₃)

AMAT 0020-03004

  • Product Name: Quartz Viewport Protector
  • Product Description: Fused quartz protective window for chamber viewports, shielding optical sensors and cameras from process plasma and contamination while maintaining optical transparency.
  • Technical Specifications:
    • Material: High-purity fused silica quartz

AMAT 0010-76136

  • Product Name: Wafer Lift HTHU Heater Assembly
  • Product Description: Heated wafer lift pin assembly with integrated heating elements, maintaining wafer temperature during transfer in high-temperature process modules.
  • Technical Specifications:
    • Wafer Size: 150mm (6") / 200mm (8")

AMAT 0010-70131

  • Product Name: Wafer Lift Pin Actuator Assembly
  • Product Description: Pneumatic actuator assembly for driving wafer lift pins, providing vertical motion to lift wafers off electrostatic chucks for robot transfer.
  • Technical Specifications:
    • Actuator Type: Double-acting pneumatic cylinder

AMAT 0010-09416

  • Product Name: Etch RF Match Assembly
  • Product Description: Automatic RF impedance matching network for P5000 Etch chambers. It optimizes power transfer between the RF generator and plasma load by adjusting impedance to minimize reflected power.
  • Technical Specifications:
    • Frequency: 13.56 MHz

AMAT 0020-30222

  • Product Name: Top Cover Handle Adapter
  • Product Description: Machined metal adapter plate for mounting chamber top cover handles, enabling safe lifting and removal of chamber lids during maintenance.
  • Technical Specifications:
    • Material: 6061-T6 Aluminum Alloy

AMAT 0020-55519

  • Product Name: Ceramic Isolator Washer
  • Product Description: High-purity ceramic washer providing electrical insulation and mechanical spacing in high-voltage sections of semiconductor process chambers.
  • Technical Specifications:
    • Material: 99.6% high-purity alumina (Al₂O₃)
    • Dimensions: 10mm OD × 5mm ID × 3mm thickness