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Gasonics AWO-1-16 Optical Viewport Assembly

Introduction: The Gasonics AWO-1-16 is a high-precision optical viewport designed for integration into vacuum chamber walls or doors. It provides a sealed optical path for visual inspection, process monitoring, and optical diagnostic systems. This component is engineered to withstand high vacuum environments, thermal cycling, and aggressive plasma conditions while maintaining optical clarity. Technical Specifications:

  • Optical Material: Synthetic Fused Silica (Quartz) or Borosilicate Glass

Gasonics A95-115-01 RF Impedance Match Network

Introduction: The Gasonics A95-115-01 is an RF impedance matching network, often referred to as an "RF Tuner" or "Match Box." It is a critical subsystem in RF plasma processing equipment. Its primary function is to match the impedance of the RF generator (typically 50 Ohms) to the dynamic impedance of the plasma load, ensuring maximum power transfer and minimizing reflected power which can damage the generator. Technical Specifications:

  • Type: Automatic L-Type or Pi-Type Impedance Matching Network

Gasonics AWO-1-5 Optical Window

Introduction: The Gasonics AWO-1-5 is an optical component, typically a viewport or window assembly, designed for installation on vacuum chamber walls or doors. It allows visual inspection of the plasma process or provides an optical path for diagnostic sensors (such as pyrometers or end-point detectors). The "AWO" series indicates an Optical/Window assembly, and "1-5" likely refers to a specific size or flange dimension. Technical Specifications:

  • Component Type: Vacuum Viewport / Optical Window

Gasonics AWD-D-3-8-007 Pneumatic Diaphragm Valve

Introduction: The AWD-D-3-8-007 is another variant in the 3/8-inch diaphragm valve series. The "007" suffix often denotes a modified internal porting or a specific orifice size designed to maximize flow conductance (Cv) while maintaining diaphragm isolation. This variant is selected when flow restriction must be minimized in critical gas lines. Technical Specifications:

  • Port Size: 3/8 inch
  • Body Material: 316L Stainless Steel

Gasonics AWD-D-3-8-006 Pneumatic Diaphragm Valve

Introduction: Similar to the 008 variant, the AWD-D-3-8-006 is a 3/8-inch pneumatic diaphragm valve. The difference in the suffix code (006 vs 008) typically indicates a variation in the diaphragm material, seal type, or internal flow path geometry optimized for a specific gas or flow characteristic. It maintains the high-purity standards required for semiconductor processing. Technical Specifications:

  • Port Size: 3/8 inch Face Seal (VCR/Swagelok compatible)
  • Body Material: 316L Stainless Steel

Gasonics AWD-D-3-8-008 Pneumatic Diaphragm Valve

Introduction: This specific part number denotes a pneumatic diaphragm valve from the AWD series with a 3/8-inch port size and a specific configuration code "008". These valves are compact, high-purity devices used for controlling small flows of aggressive or pure gases in semiconductor process tools. The diaphragm design ensures total isolation of the media from the valve's moving parts. Technical Specifications:

  • Port Size: 3/8 inch (Typically VCR or Swagelok face seal fittings)

Gasonics 95-0593 Vacuum Throttle Valve

Introduction: The Gasonics 95-0593 is a precision vacuum throttle valve used to regulate the conductance of the vacuum pumping line. It is a critical component for controlling the process pressure within the chamber, which directly influences plasma density, etch rate, and deposition uniformity. This valve allows for fine adjustment of pressure between atmosphere and high vacuum. Technical Specifications:

  • Valve Type: Pneumatically Actuated Butterfly or Poppet Throttle Valve
  • Port Size: 6-inch or 8-inch ISO-K or ISO-F Flange

Gasonics R95-3009 RF Power Supply

Introduction: The Gasonics R95-3009 is an RF (Radio Frequency) power supply or generator module. The "R" prefix typically denotes a Rack-mounted or Reflected-power protected unit, while the "95" series suggests it is part of a specific generation of Gasonics power hardware. This device generates the electromagnetic energy required to create and sustain plasma within a process chamber. Technical Specifications:

  • Type: Solid State RF Generator (likely L-Band or 13.56 MHz variant)

Gasonics 61-0052-U Pneumatic Diaphragm Valve

Introduction: This part number identifies a specific revision or base configuration of the Gasonics 61-0052 series pneumatic diaphragm valve. These valves are fundamental components in high-purity gas handling systems, providing reliable on/off or throttling control. The "U" designation often refers to a specific material specification or a universal configuration suitable for a wide range of semiconductor applications. Technical Specifications:

  • Function: On/Off or Proportional Flow Control

Gasonics MAP130-4000 Mass Flow Controller (MFC)

Introduction: The Gasonics MAP130-4000 is a thermal mass flow controller designed for precise measurement and control of gas flow rates in semiconductor manufacturing. It utilizes the principle of thermal dispersion to measure flow, providing accurate and repeatable delivery of process gases independent of temperature and pressure fluctuations. This device is essential for maintaining process stability in deposition and etching applications. Technical Specifications:

  • Measurement Principle: Thermal Mass Flow (Constant Temperature Anemometry)

Gasonics 61-0052-U AWD-D-1-0-011 Pneumatic Diaphragm Valve

Introduction: This component is a high-purity pneumatic diaphragm valve designed for semiconductor process equipment. It serves as a critical control element for managing the flow of process gases, vacuum lines, or purge gases. The "AWD" series typically indicates a specific diaphragm valve architecture optimized for cleanroom environments, featuring a diaphragm that isolates the actuator from the process media to prevent contamination and ensure leak-tight operation. Technical Specifications:

  • Valve Type: 2-way or 3-way Pneumatic Diaphragm Valve

Gasonics 94-1174 Chamber Seal

Introduction: The Gasonics 94-1174 is a sealing kit, typically consisting of elastomeric O-rings, gaskets, or quad-rings. These components are critical for maintaining the vacuum integrity of the process chamber, ensuring that gases do not leak in or out and that the required vacuum level is achieved and sustained. Technical Specifications:

  • Component Type: Static or Dynamic Seal
  • Material: Viton (FKM), Kalrez (FFKM), or Buna-N (Nitrile)