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Gasonics AWD-D-3-1-3-001 Pneumatic Diaphragm Valve
Introduction:
This part number identifies a specific configuration of a pneumatic diaphragm valve within the AWD series. The “D-3-1-3-001” suffix typically denotes a specific combination of port size, diaphragm material, and actuator type. These valves are used for high-purity control of process gases, ensuring zero contamination and leak-tight operation in semiconductor fabrication equipment.
Technical Specifications:
- Valve Type: 2-Way or 3-Way Pneumatic Diaphragm Valve
Detailed content
- Port Size: 3/8 inch (Typically VCR or Face Seal fittings)
- Body Material: 316L Stainless Steel, Electropolished (EP)
- Diaphragm Material: PTFE, PFA, or Reinforced Elastomer (depending on chemical resistance needs)
- Actuation Pressure: 60 to 100 PSI (Clean, dry air or Nitrogen)
- Maximum Operating Pressure: 150 PSIG
- Leak Rate: < 1 x 10^-9 std cc/sec Helium
- Cycle Life: > 2,000,000 cycles
Functional Features:
- Zero Dead Volume: Streamlined internal flow path prevents gas trapping and ensures rapid purging.
- Isolation Design: The diaphragm physically separates the actuator from the process media, eliminating metal-to-metal contact and particle generation.
- Chemical Inertness: Wetted parts resist corrosion from aggressive chemistries like chlorine, fluorine compounds, and acids.
- Fail-Safe Configuration: Available in Normally Open (NO) or Normally Closed (NC) to ensure safety during power or air failures.
Application Scenarios:
- Specialty Gas Handling: Controlling flows of toxic or corrosive gases (e.g., WF6, Cl2, BCl3) in etch and deposition tools.
- Vacuum Isolation: Isolating the process chamber from the vacuum pump during maintenance.
- Purge Control: Managing inert gas (N2/Ar) flows to prevent oxidation or clear reaction byproducts.
- Abatement Systems: Switching exhaust flows between the process tool and the abatement scrubber.
