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Gasonics AWO-1-9 Optical Viewport Assembly
Introduction:
The Gasonics AWO-1-9 is a viewport assembly designed for high-purity semiconductor equipment. It allows for the transmission of light into or out of the vacuum chamber while maintaining a hermetic seal. This specific model is tailored for applications requiring high optical throughput and resistance to plasma erosion.
Technical Specifications:
- Window Material: Synthetic Fused Silica (Quartz)
Detailed content
- Diameter/Flange: Specific to AWO-1-9 dimension (likely ~1.9 inches or specific metric)
- Surface Quality: 10-5 Scratch-Dig, Lambda/10 Flatness
- Vacuum Compatibility: UHV compatible, low outgassing
- Thermal Shock Resistance: High resistance to rapid temperature changes
- Mounting: Flange-mounted with bolt circle pattern
Functional Features:
- High Transmission: Optimized for UV and Visible light spectra used in plasma diagnostics.
- Chemical Durability: Quartz is inert to most acids and plasma byproducts.
- Replaceable: Designed for easy removal and replacement during chamber cleaning.
- Low Birefringence: Minimal stress on the optical element to prevent polarization effects.
Application Scenarios:
- Endpoint Detection: Providing a clear optical path for sensors detecting process completion.
- Plasma Spectroscopy: Allowing analysis of plasma emission lines.
- Visual Inspection Ports: Standard ports on chamber doors and walls.
- Metrology: Optical access for in-situ measurement tools.
