Digital guide
You are here:
Gasonics AWO-1-8 Optical Viewport
Introduction:
The Gasonics AWO-1-8 is an optical viewport assembly with a specific flange or aperture size (likely related to the “1-8” dimension, such as 1.8 inches or a specific ISO flange code). It provides a sealed optical interface for visual monitoring and diagnostic access in vacuum environments.
Technical Specifications:
- Optical Material: Fused Quartz or Borosilicate Glass
- Clear Aperture: Dependent on specific “1-8” configuration (e.g., 1.8 inch diameter)
Detailed content
- Transmission: High transmission in UV, Visible, and IR spectra
- Vacuum Rating: 1 x 10^-9 Torr
- Flange Type: ISO-K, CF, or Custom
- Pressure Rating: Full atmospheric differential
- Bakeout Temp: 150°C – 200°C
Functional Features:
- Optical Clarity: Minimal distortion for accurate visual inspection.
- Plasma Resistance: Resists darkening from UV exposure.
- Sealed Design: Metal-sealed or elastomer-sealed to maintain vacuum integrity.
- Coating Options: Anti-reflective coatings available for specific wavelength optimization.
Application Scenarios:
- Process Monitoring: Visual observation of plasma state and wafer color.
- Optical Diagnostics: Housing for pyrometers, cameras, or spectrometers.
- Laser Access: Port for alignment or processing lasers.
- Chamber Inspection: Allowing maintenance personnel to view internal components without breaking vacuum.
