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Gasonics AWO-1-10 Optical Viewport
Introduction:
The Gasonics AWO-1-10 is a large-format or specific-dimension optical viewport designed for semiconductor process equipment. It provides a robust seal and high optical quality for demanding applications where large viewing angles or high light throughput is required.
Technical Specifications:
- Optical Material: High-Purity Fused Quartz
- Diameter: 10 mm to 10 inches (Context suggests likely ~2 inches or specific flange)
Detailed content
- Transmission Range: 190 nm – 2500 nm
- Vacuum Level: 1 x 10^-9 mbar
- Flange Connection: ISO-K or CF
- Surface Finish: Ra < 0.8 micrometers on metal parts
- Outgassing Rate: < 1 x 10^-6 mbar*l/s/cm²
Functional Features:
- High Optical Quality: Suitable for imaging and precision diagnostics.
- Robust Construction: Thick optical element and heavy-duty flange for durability.
- Chemical Resistance: Impervious to most process chemicals and plasma effects.
- Easy Maintenance: Can be cleaned and re-installed without specialized tools in many setups.
Application Scenarios:
- High-Resolution Imaging: Allowing cameras to view the wafer surface clearly.
- Broadband Spectroscopy: Transmitting a wide range of wavelengths for comprehensive plasma analysis.
- Large Area Processes: Used in chambers where a wider view of the plasma is necessary.
- Safety Interlocks: Part of a system that prevents operation if the viewport is compromised.
