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Gasonics 95-0293 B Vacuum Throttle Valve
Introduction:
The Gasonics 95-0293 B is a vacuum throttle valve, likely a butterfly or poppet style, used to regulate the pumping speed and pressure within a process chamber. The “B” suffix may denote a specific revision, material set, or flange type. Precise pressure control is vital for repeatable plasma etching and deposition processes.
Technical Specifications:
- Valve Type: Pneumatically Actuated Butterfly or Poppet Throttle Valve
- Port Size: 6-inch or 8-inch ISO-K/ISO-F Flange
Detailed content
- Control Range: 1 mTorr to 760 Torr
- Actuation: Pneumatic piston (Spring return or Double acting)
- Position Feedback: LVDT or Rotary Encoder (0-10V or 4-20mA)
- Materials: Aluminum or Stainless Steel body, Viton or Buna-N seals
- Leak Rate: < 5 x 10^-7 std cc/sec
- Bakeout Temperature: Up to 150°C
Functional Features:
- Linear Flow Characteristic: Provides predictable and linear pressure control relative to valve opening.
- Closed-Loop Control: Integrates with capacitance manometers for automatic pressure stabilization.
- Fast Response: Optimized for rapid pressure changes required in multi-step process recipes.
- Low Outgassing: Materials selected to minimize contamination in high-vacuum environments.
Application Scenarios:
- Etch Process Control: Maintaining specific process pressure to control etch rate and profile.
- CVD/PVD Pressure Stabilization: Regulating pressure to ensure film uniformity and stoichiometry.
- Chamber Pump-down: Controlling evacuation speed to prevent wafer damage from rapid pressure changes.
- Venting Operations: Safe and controlled introduction of nitrogen to atmosphere.
