Digital guide
You are here:
Gasonics 17330-0 Process Chamber
Introduction:
The Gasonics 17330-0 appears to be a hardware kit or a specific chamber component assembly. Based on similar part numbers, this could be a set of chamber liners, shields, or mounting hardware. It serves as a protective or structural element within the process chamber, ensuring vacuum integrity and protecting expensive internal components from plasma erosion.
Technical Specifications:
- Component Type: Chamber Liner, Shield, or Mounting Hardware Kit
Detailed content
- Material: Aluminum (Anodized), Stainless Steel, or Quartz
- Dimensions: Specific to Gasonics chamber models (e.g., 200mm or 300mm compatibility)
- Surface Finish: Hard Anodized or Electropolished
- Temperature Resistance: Up to 200°C continuous operation
- Vacuum Compatibility: Ultra-High Vacuum (UHV) compatible materials
Functional Features:
- Erosion Resistance: Acts as a sacrificial layer to absorb ion bombardment and chemical attack.
- Particle Control: Smooth surfaces minimize particle trapping and generation.
- Chemical Compatibility: Resistant to strong acids, bases, and plasma chemistries.
- Easy Maintenance: Designed for quick replacement during preventive maintenance cycles.
Application Scenarios:
- Chamber Protection: Shielding the main chamber walls during aggressive plasma processes.
- Process Isolation: Preventing cross-contamination between different process recipes.
- Hardware Replacement: Replacing worn-out shields or liners to restore tool performance.
- Preventive Maintenance: Routine replacement to maintain vacuum levels and process stability.
