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AMAT 0200-02577

Product Name: 200mm Ceramic Lift Pin Plate / Wafer Lift Assembly

Product Description: A high-performance ceramic component designed to support and vertically lift 200mm wafers within semiconductor process chambers. It integrates precision lift pins to safely raise wafers off the electrostatic chuck (ESC) for robot transfer.
Technical Specifications:
  • Wafer Size: 200mm (8-inch).

AMAT 0200-01991

Product Name: 200mm Chamber Focus Ring / Gas Baffle
Product Description: A precision-machined annular component installed within 200mm semiconductor process chambers. It functions to focus plasma towards the wafer surface and optimize the distribution of process gases, ensuring uniform thin-film deposition or etching.
Technical Specifications:
  • Wafer Compatibility: 200mm (8-inch) wafer systems.

AMAT 0100-90886

Product Name: Digital I/O (Input/Output) Interface PCB Assembly
Product Description: A printed circuit board that provides the interface between the system controller and all digital field devices. It handles the input of status signals and output of control signals.
Technical Specifications:
  • I/O Channels: Configurable 16/32 discrete inputs and 16/32 discrete outputs.

AMAT 1400-01056

Product Name: Input Shuttle Limit Sensor (CMP Cleaner)
Product Description: A precision industrial sensor that detects the position of the input shuttle in CMP (Chemical Mechanical Planarization) cleaner systems. It provides position feedback and safety interlocking for wafer transfer shuttles.
Technical Specifications:
  • Type: Inductive or photoelectric proximity sensor.

AMAT 0120-90146

Product Name: Gauge Controller Module (Vacuum / Pressure Control)
Product Description: An electronic module dedicated to interfacing, controlling, and reading vacuum gauges and pressure transducers. It provides precise vacuum measurement and control for process chambers.
Technical Specifications:
  • Input Channels: Supports multiple gauge types: cold cathode, Pirani, and capacitance manometers.

AMAT 0020-20403

Product Name: Quartz / Ceramic Viewport / Window Insert
Product Description: A high-purity, transparent window component installed in process chamber walls or lids. It allows visual inspection or optical monitoring of the process environment while maintaining vacuum integrity.
Technical Specifications:
  • Material: High-purity fused silica (quartz) or sapphire for maximum optical transmission.

AMAT 1037-60969

Product Name: Precision Motion Sensor / Encoder Module
Product Description: A high-resolution optical or magnetic encoder module designed for precise position and velocity feedback in servo-motor driven motion systems. It provides real-time position data for closed-loop control.
Technical Specifications:
  • Type: Incremental optical encoder with high line count.

AMAT 0050-37273

Product Name: Ultra-High Purity (UHP) Gas Line Weldment / Tubing Assembly
Product Description: A custom-fabricated stainless steel tubing assembly for the safe and clean delivery of ultra-high purity process gases in semiconductor fabrication. It features precision welding and electropolishing.
Technical Specifications:
  • Material: 316L VIM/VAR stainless steel tubing.

AMAT 0010-01231

Product Name: Ceramic Heater Pedestal / Susceptor Assembly
Product Description: A integrated ceramic heater and wafer support pedestal (susceptor) designed for precise, uniform wafer heating in thermal processing chambers. It combines a heating element with a ceramic support structure.
Technical Specifications:
  • Material: Multi-layer high-purity alumina (Al₂O₃) ceramic body.

AMAT 0140-01620

Product Name: DC Power / UPS Cable Harness Assembly
Product Description: A heavy-duty, factory-assembled power cable harness designed to distribute direct current (DC) power or connect uninterruptible power supply (UPS) systems to critical tool components. It ensures reliable power delivery in industrial semiconductor environments.
Technical Specifications:
  • Conductor: High-purity stranded copper wires, sized for high current carrying capacity.

AMAT 0020-21589

Product Name: ESC (Electrostatic Chuck) Insulator Ring / Spacer
Product Description: A high-performance ceramic component that provides electrical isolation and precise spacing for the electrostatic chuck (ESC) assembly within semiconductor process chambers. It separates the chuck electrode from grounded metal structures.
Technical Specifications:
  • Material: High-purity alumina (Al₂O₃) ceramic with exceptional dielectric strength.

AMAT 0020-26823

Product Name: 6" HTHU Deposition Low Knee Shield
Product Description: A precision-machined annular shield component designed for 6-inch (150mm) wafer process chambers, specifically for HTHU (High Throughput Uniformity) deposition processes. It confines plasma, protects chamber components, and ensures uniform thin-film growth.
Technical Specifications:
  • Wafer Compatibility: 6-inch (150mm) wafer systems.