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Gasonics 15698-02 RF Generator

Introduction: The Gasonics 15698-02 is an RF (Radio Frequency) power supply module or a specific sub-assembly within a larger generator system. This component is responsible for generating the electromagnetic energy required to ignite and sustain plasma in process chambers. It is designed for high reliability and precise power delivery in semiconductor manufacturing. Technical Specifications:

  • Type: Solid State RF Generator or Tube-Based (Tetrode/Triode)
  • Frequency: 13.56 MHz (Standard) or 2 MHz - 60 MHz (Tunable)

Gasonics 95-0552 A Vacuum Throttle Valve

Introduction: The Gasonics 95-0552 A is a precision vacuum throttle valve, likely a poppet or butterfly design, identified by the "A" revision or configuration code. It is designed for high-accuracy pressure regulation in semiconductor process tools, ensuring process repeatability and chamber protection. Technical Specifications:

  • Valve Type: Throttle Valve (Poppet or Butterfly)
  • Flange Size: Likely 6-inch or 8-inch ISO standard

Gasonics 95-0293 B Vacuum Throttle Valve

Introduction: The Gasonics 95-0293 B is a vacuum throttle valve, likely a butterfly or poppet style, used to regulate the pumping speed and pressure within a process chamber. The "B" suffix may denote a specific revision, material set, or flange type. Precise pressure control is vital for repeatable plasma etching and deposition processes. Technical Specifications:

  • Valve Type: Pneumatically Actuated Butterfly or Poppet Throttle Valve
  • Port Size: 6-inch or 8-inch ISO-K/ISO-F Flange

Gasonics AWD-D-3-3-5 Pneumatic Diaphragm Valve

Introduction: The Gasonics AWD-D-3-3-5 is a compact pneumatic diaphragm valve featuring a 3/8-inch port configuration. The "3-5" suffix often indicates a specific internal geometry or a high-flow variant designed to minimize pressure drop. It is a critical component for precise gas handling in high-purity environments. Technical Specifications:

  • Port Size: 3/8 inch VCR or Swagelok
  • Body Material: 316L Stainless Steel

Gasonics AWD-D-3-1-3-001 Pneumatic Diaphragm Valve

Introduction: This part number identifies a specific configuration of a pneumatic diaphragm valve within the AWD series. The "D-3-1-3-001" suffix typically denotes a specific combination of port size, diaphragm material, and actuator type. These valves are used for high-purity control of process gases, ensuring zero contamination and leak-tight operation in semiconductor fabrication equipment. Technical Specifications:

  • Valve Type: 2-Way or 3-Way Pneumatic Diaphragm Valve

Gasonics AWO-1-16 Optical Viewport Assembly

Introduction: The Gasonics AWO-1-16 is a high-precision optical viewport designed for integration into vacuum chamber walls or doors. It provides a sealed optical path for visual inspection, process monitoring, and optical diagnostic systems. This component is engineered to withstand high vacuum environments, thermal cycling, and aggressive plasma conditions while maintaining optical clarity. Technical Specifications:

  • Optical Material: Synthetic Fused Silica (Quartz) or Borosilicate Glass

Gasonics A95-115-01 RF Impedance Match Network

Introduction: The Gasonics A95-115-01 is an RF impedance matching network, often referred to as an "RF Tuner" or "Match Box." It is a critical subsystem in RF plasma processing equipment. Its primary function is to match the impedance of the RF generator (typically 50 Ohms) to the dynamic impedance of the plasma load, ensuring maximum power transfer and minimizing reflected power which can damage the generator. Technical Specifications:

  • Type: Automatic L-Type or Pi-Type Impedance Matching Network

Gasonics AWO-1-5 Optical Window

Introduction: The Gasonics AWO-1-5 is an optical component, typically a viewport or window assembly, designed for installation on vacuum chamber walls or doors. It allows visual inspection of the plasma process or provides an optical path for diagnostic sensors (such as pyrometers or end-point detectors). The "AWO" series indicates an Optical/Window assembly, and "1-5" likely refers to a specific size or flange dimension. Technical Specifications:

  • Component Type: Vacuum Viewport / Optical Window

Gasonics AWD-D-3-8-007 Pneumatic Diaphragm Valve

Introduction: The AWD-D-3-8-007 is another variant in the 3/8-inch diaphragm valve series. The "007" suffix often denotes a modified internal porting or a specific orifice size designed to maximize flow conductance (Cv) while maintaining diaphragm isolation. This variant is selected when flow restriction must be minimized in critical gas lines. Technical Specifications:

  • Port Size: 3/8 inch
  • Body Material: 316L Stainless Steel

Gasonics AWD-D-3-8-006 Pneumatic Diaphragm Valve

Introduction: Similar to the 008 variant, the AWD-D-3-8-006 is a 3/8-inch pneumatic diaphragm valve. The difference in the suffix code (006 vs 008) typically indicates a variation in the diaphragm material, seal type, or internal flow path geometry optimized for a specific gas or flow characteristic. It maintains the high-purity standards required for semiconductor processing. Technical Specifications:

  • Port Size: 3/8 inch Face Seal (VCR/Swagelok compatible)
  • Body Material: 316L Stainless Steel

Gasonics AWD-D-3-8-008 Pneumatic Diaphragm Valve

Introduction: This specific part number denotes a pneumatic diaphragm valve from the AWD series with a 3/8-inch port size and a specific configuration code "008". These valves are compact, high-purity devices used for controlling small flows of aggressive or pure gases in semiconductor process tools. The diaphragm design ensures total isolation of the media from the valve's moving parts. Technical Specifications:

  • Port Size: 3/8 inch (Typically VCR or Swagelok face seal fittings)

Gasonics 95-0593 Vacuum Throttle Valve

Introduction: The Gasonics 95-0593 is a precision vacuum throttle valve used to regulate the conductance of the vacuum pumping line. It is a critical component for controlling the process pressure within the chamber, which directly influences plasma density, etch rate, and deposition uniformity. This valve allows for fine adjustment of pressure between atmosphere and high vacuum. Technical Specifications:

  • Valve Type: Pneumatically Actuated Butterfly or Poppet Throttle Valve
  • Port Size: 6-inch or 8-inch ISO-K or ISO-F Flange