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AMAT 0010-09062

Product Name: Serial Communication & I/O Controller PCB

Product Description: A printed circuit board assembly that manages serial communication protocols and provides I/O control for interfacing the main tool controller with various peripheral modules and sensors.
Technical Specifications:
  • Processor: 32-bit embedded microcontroller

AMAT 0020-31216

Product Name: Stainless Steel Chamber Shield Clamp Ring
Product Description: A robust, precision-machined metal ring designed to securely fasten and seal chamber shields and liners. It ensures proper alignment and prevents gas leakage in high-vacuum environments.
Technical Specifications:
  • Material: 304 Stainless Steel, passivated

AMAT MA-12432

Product Name: High-Precision Gas Pressure Regulator
Product Description: A single-stage, high-precision pressure regulator designed for the stable control of inlet pressure in ultra-high purity gas lines. It delivers a constant output pressure regardless of fluctuations in supply pressure.
Technical Specifications:
  • Inlet Pressure: Up to 3000 PSI

AMAT 0900-01053

Product Name: RF Low Pass Harmonic Filter Assembly
Product Description: A passive electronic filter designed to suppress high-frequency harmonic distortions generated by RF power supplies. It ensures clean power delivery to the process chamber and protects sensitive equipment.
Technical Specifications:
  • Frequency Range: Cut-off frequency 13.56 MHz (fundamental RF)

AMAT 0140-01587

Product Name: CEB DeviceNet Input Harness Assembly
Product Description: A pre-configured cable harness assembly designed to interface the Equipment Control Board (CEB) with DeviceNet network components. It facilitates reliable communication between the main controller and peripheral devices.
Technical Specifications:
  • Communication Protocol: DeviceNet (CAN-based)

AMAT 0021-20198

Product Name: High-Purity Ceramic Gas Baffle/Flow Distribution Plate

Product Description: A precision-engineered ceramic plate designed to disrupt, diffuse, and uniformly distribute process gas flow within a semiconductor chamber. It ensures laminar flow and prevents direct gas impingement on the wafer.

AMAT 0020-42237

Product Name: Vespel Composite Cover Ring (200mm)

Product Description: A high-performance ring fabricated from Vespel (polyimide) composite, designed for high-temperature, high-wear applications. It acts as a protective cover and thermal barrier in electrostatic chuck (ESC) assemblies.
Technical Specifications:
  • Material: Vespel SP-21 (polyimide composite with carbon fiber filler)

AMAT 1140-00289

Product Name: Industrial DC Power Supply Module

Product Description: A compact, high-efficiency switching power supply designed to provide stable, low-ripple DC voltage for control systems and sensitive electronics in semiconductor fabrication tools.
Technical Specifications:
  • Input Voltage: 100-240V AC, 50/60 Hz (auto-ranging)

AMAT 0240-88626

Product Name: Precision Pneumatic Flow Control Valve Assembly
Product Description: A high-precision pneumatic valve designed for the accurate control of gas flow in ultra-high purity (UHP) gas delivery systems. It ensures stable and repeatable flow rates for critical semiconductor processes.
Technical Specifications:
  • Valve Type: Bellows-sealed, pneumatically actuated

AMAT 0020-43500

Product Name: High-Purity Ceramic Insulator Ring
Product Description: A precision-machined ceramic ring designed to provide electrical isolation and thermal stability between critical components within semiconductor process chambers. It serves as a non-conductive barrier to prevent electrical arcing and ensure process purity.
Technical Specifications:
  • Material: High-purity alumina (Al₂O₃), ≥ 99.6% purity

AMAT 0190-49610

Product Name: Automatic RF Match Network Control PCB
Product Description: The main control board for an automatic RF impedance matching network. It manages servo motors, capacitive/inductive tuning, and RF power feedback.
Technical Specifications:
  • Microcontroller: 32-bit embedded processor

AMAT 0090-06421

Product Name: Chamber Safety Interlock Sensor Assembly
Product Description: A safety module that monitors chamber door status and vacuum interlocks, ensuring safe operation of semiconductor process chambers.
Technical Specifications:
  • Sensor Type: Non-contact magnetic reed switch