AMAT 0010-47882
Product Name: Multi‑Zone Heater Pedestal & Wafer Support Assembly
Product Description: An integrated wafer support heater assembly with multi‑zone independent temperature control, used to provide precise and uniform thermal environment for wafers in thin film deposition and etching processes. It integrates heating, support and RF bias functions to meet complex process requirements.
Technical Specifications:
- Temperature Control Range: Room temperature to 600°C









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