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AMAT C190238
Product Name: Precision Machined Structural Component & Positioning Subassembly
Product Description: A customized high‑precision mechanical structural part developed for semiconductor wafer handling and chamber motion systems. It is used for precise positioning, load bearing, motion guidance and structural connection in automated material handling systems, ensuring the stability and repeatability of wafer transmission.
Technical Specifications:
- Material: Aerospace‑grade 6061‑T6 aluminum alloy, 316L stainless steel optional
Detailed content
- Machining Accuracy: Sub‑micron dimensional tolerance and geometric tolerance
- Surface Treatment: Electropolishing, passivation, hard anodization to improve wear and corrosion resistance
- Cleanliness Class: Class 100 cleanroom manufacturing and packaging
- Load Capacity: Designed for dynamic and static loads in wafer robot systems
- Fatigue Performance: Adapt to millions of times of reciprocating motion without fatigue failure
Key Features:
- Ultra‑high dimensional stability, no thermal deformation during long‑term operation
- Low outgassing and non‑shedding characteristics, meeting semiconductor cleanroom requirements
- Optimized structural rigidity to reduce vibration and offset during high‑speed motion
- Compatible with vacuum, inert gas and corrosive process gas environments
- Standardized interface design, convenient for quick installation and replacement
Application Scenarios:
Used in wafer handling robots, wafer pre‑alignment stations, chamber linear motion modules, elevator platforms and precision positioning components in AMAT semiconductor equipment, supporting 200mm / 300mm wafer automated production lines.
