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AMAT 0010-77533

Product Name: 200mm MIRRA Titan 1 CMP Polishing Head Assembly
Product Description: This is a special polishing head assembly designed for Applied Materials MIRRA chemical mechanical planarization (CMP) system, specially used for 200mm wafer surface polishing. It realizes uniform pressure application, stable wafer clamping and efficient slurry distribution, ensuring the global and local flatness of wafer surface.
Technical Specifications:
  • Applicable wafer size: 200mm (8-inch) semiconductor wafers

AMAT 0100-00472

Product Name: High-Speed Motion Control Processor PCB Module
Product Description: This is a dedicated motion control circuit board module for semiconductor automation equipment, responsible for closed-loop control of wafer handling robots, precision platforms and servo drives. It realizes high-precision positioning, speed control and action sequence logic, ensuring the stability and accuracy of wafer transmission.
Technical Specifications:
  • Built-in 32-bit high-performance motion control processor

AMAT 0040-03608

Product Name: High-Precision Vacuum Chamber Structural Component Assembly
Product Description: This is a precision-machined core structural assembly for semiconductor vacuum process chambers, widely used in PVD, CVD and etching systems. It provides stable mechanical support and airtight sealing for the internal environment of the chamber, ensuring the stability of the process under ultra-high vacuum and plasma conditions.
Technical Specifications:
  • Main material: high-purity 6061-T6 aluminum alloy with precision CNC machining

AMAT 0200-23278

Product Name: Integrated Equipment Operator Control Console & Human-Machine Interface System
Product Description: This component is a dedicated main control console and human-machine interaction unit for high-end semiconductor manufacturing equipment, mainly used in etching, deposition, and thin-film process platforms. It integrates system monitoring, parameter configuration, fault diagnosis, and process control functions, serving as the core operation hub for equipment commissioning, daily production, and maintenance.
Technical Specifications:
  • Industrial-grade high-resolution liquid crystal display with anti-glare and cleanroom-compatible surface

AMAT 0240-76625

Product Name: Mainframe Controller Interface PCB
Product Description: A critical printed circuit board that manages communication and control signals between the tool mainframe and all process modules. Ensures synchronized operation and data acquisition.
Technical Specifications:
  • Processor: 32-bit RISC microcontroller

AMAT 3060-01121

Product Name: Analog I/O Module (8-Channel Isolated)
Product Description: A high-performance industrial PCB module that provides galvanically isolated analog input/output signal conditioning for process monitoring and control.
Technical Specifications:
  • Input Channels: 8 x 16-bit analog inputs (0–10V, 4–20mA)

AMAT 0015-76127

Product Name: Captive Screw Assembly (M5 x 20mm)
Product Description: A precision stainless steel captive screw designed for securing chamber components without risk of dropping into the process area. Ensures safe maintenance and component alignment.
Technical Specifications:
  • Material: 316L stainless steel

AMAT 0040-41061

Product Name: Chamber Liner Weldment
Product Description: A one-piece, cylindrical stainless steel liner that lines the inner chamber wall. It protects the chamber body from deposition buildup and simplifies maintenance.
Technical Specifications:
  • Material: 316L stainless steel (electropolished)

AMAT 5000-138

Product Name: Internal Retaining Ring (Lug Style)
Product Description: A precision stamped retaining ring designed for securing cylindrical components in internal grooves. It provides high axial load capacity in compact spaces.
Technical Specifications:
  • Material: 316L stainless steel (passivated)

AMAT 0020-75580

Product Name: Wafer Lift Pin Guide Assembly
Product Description: A precision linear guide system for wafer lift pins. It ensures smooth, vertical travel of lift pins, preventing wobble and particle generation during wafer elevation.
Technical Specifications:
  • Material: 316L stainless steel (body), PEEK (guide bushings)

AMAT 0020-54777

roduct Name: ESC Pedestal Insulator Ring
Product Description: A high-purity ceramic ring that provides electrical isolation between the ESC pedestal and the grounded chamber body. It prevents RF leakage and ensures stable electrostatic clamping.
Technical Specifications:
  • Material: 99.9% high-purity alumina (Al₂O₃)

AMAT 0020-54777

Product Name: ESC Pedestal Insulator Ring
Product Description: A high-purity ceramic ring that provides electrical isolation between the ESC pedestal and the grounded chamber body. It prevents RF leakage and ensures stable electrostatic clamping.
Technical Specifications:
  • Material: 99.9% high-purity alumina (Al₂O₃)