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Lam Research 810-002895-002

Product Name​
Public spare-part sources list this number under different identities. Verify the equipment BOM before use.
Option A – Focus Ring​
Product Type: Silicon-coated or ceramic-coated focus ring for etch reactor.
Base Material: Silicon or 6061-T6 aluminum.

Lam Research 810-001489-016

Product Name​
Rocker Valve Interface Board / Dual Valve Control PCBA.
Product Introduction​
This board provides the electrical interface between Lam Research semiconductor tool controllers and rocker or pneumatic valve assemblies. It processes valve command signals and status feedback for gas box, vacuum, and process chamber subsystems in etch and deposition platforms.

SEW-Eurodrive 8141649

Product Name​
Industrial frequency inverter main control board.
Introduction​
This board serves as the central processing and logic interface inside SEW-Eurodrive frequency inverter systems. It manages motor control algorithms, switching commands, feedback processing and communication with higher-level automation networks.

GE 8102-HO-IP

Product Name​
PAC8000 eight-channel single-ended HART analog output module.
Introduction​
This module converts digital commands from the PAC8000 backplane into standard 4 to 20 milliamp analog output signals for valves, actuators and HART field instruments. It provides bidirectional HART communication for remote configuration and diagnostics.

LAM Research 810-810202-013

Product Name​
VMEbus communication and interface printed circuit board assembly.
Introduction​
This board manages backplane communication, signal conversion and data routing between tool controllers and subordinate subsystems. It is intended for legacy semiconductor etch and deposition racks that use VME automation.

LAM Research 810-800082-043

Product Name​
VMEbus digital input and output printed circuit board assembly.
Introduction​
This board processes interlock signals, sensor states and high-density digital I/O across semiconductor etch or deposition tool racks. It is engineered for noisy plasma environments where reliable isolation and deterministic state reporting are required.

LAM Research 810-520659-001

Product Name​
Tool I/O and RF generator interface controller assembly, supplied in serial I/O, general I/O controller and RF match interface configurations depending on platform.
Introduction​
This assembly supports communication between chamber subsystems, RF sources, sensors and the main tool controller. Public supplier data lists it for serial peripheral communication, digital I/O routing and RF generator or match monitoring on etch platforms.

LAM Research 810-234640-312

Product Name​
High-reliability isolated power distribution module for semiconductor process equipment.
Introduction​
This module converts facility AC input into multiple isolated DC outputs for motion control, data acquisition, temperature control and other tool subsystems. It is designed for advanced etch, CVD and metal deposition platforms where electrical isolation and power stability are critical.

LAM Research 810-225420-002

Product Name​
Semiconductor control and interface printed circuit board module.
Introduction​
This module provides signal routing, circuit interconnection and control logic within Lam Research semiconductor manufacturing equipment. It supports reliable communication between backplane, subsystem cards and host controller functions.

LAM Research 810-102361-222

Product Name​
Semiconductor chamber signal multiplexer and telemetry interface printed circuit assembly, also listed by some suppliers as an RF match network assembly for dry etch systems.
Introduction​
This assembly routes high-density analog and digital sensor signals between process chambers and the central tool controller. It is built for plasma etch platforms where stable telemetry, low crosstalk, and impedance matching are required to maintain uniform process results.

Woodward 8440-2052F

Product Name: Woodward easYgen-3000/3200 P2 Genset Controller with Enhanced Control Functions
Product Introduction: This controller provides generator automation, synchronization, load sharing, breaker control and protection for single or multiple gensets. The P2 configuration adds advanced PID and configurable control packages for complex paralleling or microgrid applications.

Woodward 8440-2047C

Product Name: Woodward easYgen-3000/3500-Class Genset and Paralleling Controller
Product Introduction: This controller integrates speed control, generator metering, automatic synchronization, load sharing, breaker control and protection for standby or prime-power generator sets. Documented marine and industrial variants support single-unit operation as well as multi-unit paralleling.