Technical Specifications​

Supply Voltage: 24 VDC.

Digital Outputs: 16 channels.

Dimensions: 100 × 63.5 × 22.9 mm.

Weight: Approximately 0.2 kg.

Indicator: Diagnostic LED.

Board Type: Rocker valve interface PCB.

Functional Features​

Multi-channel valve driving logic, low-voltage logic isolation, status feedback reporting, controller-to-valve signal translation, and onboard diagnostics through LED indicators.

Structure Characteristics​

Industrial PCB with multi-pin backplane connector, discrete valve headers, driver components, logic circuits, and conformal protection suited for cleanroom cabinet installation.

Working Principle​

The controller sends valve commands to the PCB. The board converts logic-level signals into driven outputs for rocker or solenoid valves, monitors return status, and reports fault or position conditions to the host system.

Application Scenarios​

Lam Research semiconductor etch systems, gas delivery boxes, vacuum valve manifolds, CMP support subsystems, and process chamber pneumatic control loops.

Installation Requirements​

Place the tool in approved maintenance mode. Isolate electrical, pneumatic, vacuum, and process gas sources. Use ESD wrist strap and cleanroom gloves. Photograph all connectors and board location before removal. Seat the board straight into the designated slot. Verify part number and revision against the existing assembly.

Usage Precautions​

Do not install in powered racks. Do not substitute different 810-001489 revisions without verifying connector pinout. Inspect connectors for contamination before mounting. Confirm valve mapping in host software after replacement.

Source Note​

Information is compiled from publicly listed semiconductor spare-part sources; confirm exact voltage, pinout, and tool compatibility with the equipment BOM and Lam Research documentation.