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AMAT 0060-22552

  • Product Name: AMAT 0060 - 22552 Semiconductor Process Gas Purification System
  • Product Introduction: The AMAT 0060 - 22552 is a gas purification system designed to remove impurities from process gases used in semiconductor manufacturing. High - purity process gases are essential for ensuring the quality and reliability of semiconductor devices, as even trace amounts of impurities can cause device defects and reduce yield.
  • Technical Specifications:
    • Purification Technology: Uses a combination of physical and chemical purification methods, including gettering, adsorption

AMAT 0050-15442

  • Product Name: AMAT 0050 - 15442 Semiconductor Wafer Temperature Control Module
  • Product Introduction: The AMAT 0050 - 15442 is a temperature control module designed to maintain precise temperature conditions for semiconductor wafers during various manufacturing processes. Temperature control is critical in semiconductor processes such as deposition, etching, and annealing, as it directly affects the quality and performance of the deposited films and the overall device characteristics.
  • Technical Specifications:
    • Temperature Range: Can control the wafer temperature in the range of - 50°C to 300°C, covering a wide range of process requirements.

AMAT 0040-20332

  • Product Name: AMAT 0040 - 20332 Chemical Delivery Pump for Semiconductor Processes
  • Product Introduction: The AMAT 0040 - 20332 is a high - precision chemical delivery pump used in semiconductor manufacturing processes. It is responsible for accurately and reliably delivering various chemicals, such as photoresists, developers, etchants, and cleaning agents, to different process stations in a semiconductor fab. The precise control of chemical delivery is crucial for ensuring consistent process results and high - quality semiconductor devices.
  • Technical Specifications:
    • Pump Type: It is a diaphragm - type pump, which provides excellent chemical compatibility and can handle a wide range of corrosive and abrasive chemicals.

AMAT 0040-10122

  • Product Name: AMAT 0040 - 10122 Semiconductor Wafer Cleaning Nozzle
  • Product Introduction: The AMAT 0040 - 10122 is a specialized nozzle designed for semiconductor wafer cleaning processes. In semiconductor manufacturing, wafer cleaning is a crucial step to remove contaminants such as particles, organic residues, and metal ions from the wafer surface before and after various processing steps. This nozzle plays a vital role in delivering cleaning fluids effectively and uniformly to ensure high - quality cleaning results.
  • Technical Specifications:
    • Material: Constructed from high - purity polyether ether ketone (PEEK) and stainless steel. PEEK offers excellent chemical resistance to a wide range of cleaning chemicals, while stainless steel provides structural strength and durability.

AMAT 0020-43681

  • Product Name: AMAT 0020 - 43681 Plasma Etching Power Supply
  • Product Introduction: The AMAT 0020 - 43681 is a high - power plasma etching power supply used in semiconductor plasma etching equipment. Plasma etching is a key process for creating fine patterns on semiconductor wafers by selectively removing material using reactive plasmas. This power supply provides the necessary electrical energy to generate and sustain the plasma, enabling precise and efficient etching.
  • Technical Specifications:
    • Power Output: It can deliver a maximum power of 5 kW, with a wide adjustable power range from 100 W to 5 kW. This allows for flexibility in etching different materials and feature sizes on the wafer.

AMAT 0020-40222

  • Product Name: AMAT 0020 - 40222 Wafer Inspection System Optics Module
  • Product Introduction: The AMAT 0020 - 40222 is an optics module specifically designed for semiconductor wafer inspection systems. Wafer inspection is a critical step in semiconductor manufacturing to detect defects such as particles, scratches, and pattern irregularities on the wafer surface. This optics module provides high - resolution imaging capabilities to enable accurate and efficient defect detection.
  • Technical Specifications:
    • Optical Resolution: It offers a high optical resolution of 0.5 μm, allowing it to detect even the smallest defects on the wafer surface.

AMAT 0020-34112

  • Product Name: AMAT 0020 - 34112 Chemical Vapor Deposition (CVD) Source
  • Product Introduction: The AMAT 0020 - 34112 is a high - performance source module used in chemical vapor deposition (CVD) systems. CVD is a key process in semiconductor manufacturing for depositing thin films of various materials onto semiconductor wafers. This source provides the necessary precursor materials in a controlled manner to enable the deposition of high - quality films with precise thickness and composition.
  • Technical Specifications:
    • Precursor Delivery System: It features a dual - channel precursor delivery system. Each channel can handle a different precursor gas

AMAT 0020-33164

  • Product Name: AMAT 0020 - 33164 Wafer Transfer Robot Arm
  • Product Introduction: The AMAT 0020 - 33164 is a sophisticated robotic arm designed for the automated transfer of semiconductor wafers between different process stations within a semiconductor fabrication facility. It plays a vital role in ensuring the smooth and efficient flow of wafers through the production line, minimizing human intervention and reducing the risk of contamination.
  • Technical Specifications:
    • Mechanical Structure: The robot arm is constructed from lightweight yet rigid carbon - fiber composite materials.

AMAT 0010-70322

  • Product Name: AMAT 0010 - 70322 Advanced Semiconductor Etching Chamber Component
  • Product Introduction: The AMAT 0010 - 70322 is a high - precision component designed for use in advanced semiconductor etching chambers. It is a key element in the process of creating intricate patterns on semiconductor wafers, which is crucial for the production of modern integrated circuits. This component is engineered to operate reliably in the demanding environment of an etching chamber, where high - energy plasmas and reactive gases are used to remove material from the wafer surface.

AMAT 0140-80103

  • Product Name: AMAT 0140 - 80103 Semiconductor Wafer Edge Inspection System
  • Product Introduction: The edge of a semiconductor wafer is a critical area that can be prone to defects such as chips, cracks, and contamination. These edge defects can affect the overall quality and reliability of the semiconductor devices. This wafer edge inspection system is designed to detect and analyze edge defects with high precision and speed.
  • Technical Specifications:
    • Inspection Resolution: Can achieve high inspection resolution, typically in the sub - micrometer range.

AMAT 0130-72336

  • Product Name: AMAT 0130 - 72336 Semiconductor Process Chamber Heating Zone Insulation
  • Product Introduction: In semiconductor process chambers, maintaining proper temperature distribution is essential for the success of various thermal - based processes. The heating zone insulation is used to minimize heat loss from the heating elements and ensure that the heat is directed towards the wafer, improving process efficiency and temperature uniformity.
  • Technical Specifications:
    • Material: Made from high - temperature - resistant and low - thermal - conductivity materials such as ceramic fibers, graphite felt, or refractory bricks.

AMAT 0120-64569

  • Product Name: AMAT 0120 - 64569 Semiconductor Wafer Handling Robot End - Effector
  • Product Introduction: In semiconductor fabs, wafer handling robots are used to transfer wafers between different process stations, storage cassettes, and inspection equipment. The end - effector is the part of the robot that directly contacts the wafer, and its design and performance are crucial for safe and reliable wafer handling.
  • Technical Specifications:
    • Wafer Size Compatibility: Designed to handle specific wafer sizes, commonly 200 mm and 300 mm wafers. It may have adjustable features to accommodate slight variations in wafer diameter or thickness.