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AMAT 0020-29750 Ceramic Chamber Liner

Product Description: A high-purity ceramic liner designed to protect 200mm process chamber walls from plasma erosion and chemical contamination. It provides a chemically inert, low-particle surface for advanced semiconductor manufacturing processes, extending chamber maintenance intervals.
Technical Specifications:
  • Material: 99.6% high-purity alumina (Al₂O₃)
  • Density: > 3.9 g/cm³
  • Dielectric Strength: > 15kV/mm

AMAT 58900145R RF Generator Control Board

Product Description: A high-performance printed circuit board (PCB) designed for precise control and monitoring of RF generators in plasma processing equipment. It manages RF power output, frequency tuning, and impedance matching to ensure optimal plasma stability and process repeatability.
Technical Specifications:
  • Processor: 32-bit ARM Cortex-M7 microcontroller
  • RF Frequency Range: 400kHz to 60MHz

AMAT 0020-30552 Wafer Pedestal Assembly

Product Description: A high-precision electrostatic chuck (ESC) pedestal assembly engineered for 200mm wafer handling and processing in semiconductor manufacturing equipment. It provides stable wafer clamping, precise temperature control, and electrical biasing for advanced thin-film deposition and etching processes.
Technical Specifications:
  • Wafer Compatibility: 200mm (8-inch) silicon wafers
  • Chuck Type: Electrostatic (Coulombic) ESC

AMAT 0050-37915 Gas Line Weldment Assembly

Product Description: A precision-engineered, leak-tight gas line weldment assembly designed for ultra-high-purity (UHP) gas delivery systems in semiconductor manufacturing. It provides a seamless, contamination-free pathway for process gases between gas panels and process chambers, ensuring consistent gas flow and purity.
Technical Specifications:
  • Material: 316L electropolished stainless steel (Ra < 0.4 μm)
  • Connection Type: VCR face-seal fittings (1/4" & 3/8" standard)

AMAT 0021-39943 Pump Port Liner Assembly

Product Description: A precision-engineered liner for vacuum pump ports, designed to protect pump interfaces from process contamination and maintain optimal vacuum performance. It features an IPS-cleaned surface for ultra-high purity applications.
Technical Specifications:
  • Material: 6061-T6 aluminum alloy (electropolished)
  • Surface Finish: Ra <0.4μm (IPS cleaning standard)

AMAT 0190-16177 Wafer Position Sensor Assembly

Product Description: A non-contact optical sensor system designed for precise detection and verification of wafer position in semiconductor handling and processing equipment. It ensures accurate wafer placement and prevents processing errors.
Technical Specifications:
  • Sensing Principle: Reflective optical triangulation
  • Detection Range: 5–50mm
  • Resolution: 0.1mm

AMAT 0021-45259 Ceramic Chamber Liner Assembly

Product Description: A high-purity ceramic liner designed to protect process chamber walls from plasma damage and contamination. It provides a chemically inert surface for advanced semiconductor manufacturing processes.
Technical Specifications:
  • Material: 99.6% high-purity alumina (Al₂O₃)
  • Density: >3.9 g/cm³
  • Dielectric Strength: >15kV/mm

AMAT 0100-90708 Vacuum Interlock Safety Module

Product Description: A critical safety PCB module that implements vacuum system interlock logic to protect personnel and equipment from hazardous conditions. It monitors vacuum levels and initiates safety protocols when thresholds are breached.
Technical Specifications:
  • Input Channels: 8 vacuum sensor inputs (analog/digital)
  • Output Channels: 12 relay outputs (2A @ 30V DC)

AMAT 0190-00958 RF Match Network Controller

Product Description: A specialized controller module for automatic tuning of RF match networks in plasma processing equipment. It ensures maximum power transfer efficiency between RF generators and process chambers.
Technical Specifications:
  • RF Frequency Range: 400kHz–60MHz
  • Power Handling: Up to 10kW continuous
  • Control Interface: Analog (0–10V) and digital (RS-232/Ethernet)

AMAT 0100-35070 Vacuum System Controller Board

Product Description: A high-performance printed circuit board (PCB) designed for precise control and monitoring of vacuum systems in semiconductor processing equipment. It manages vacuum pumps, valves, and pressure sensors to maintain optimal chamber conditions.
Technical Specifications:
  • Processor: 32-bit ARM Cortex-M4 microcontroller
  • Memory: 16MB SDRAM, 32MB Flash

AMAT 0150-92402 SCIM Modem Communication Module

Product Description: A specialized communication module implementing the SCIM (Semiconductor Equipment Communication Interface) protocol, enabling reliable data exchange between AMAT process equipment and factory host systems.
Technical Specifications:
  • Protocol Support: SCIM, SECS-II (SEMI E5), HSMS (SEMI E37)
  • Interface: Ethernet 10/100Base-T, RS-232 serial

AMAT 0050-62843 Precision Flow Meter Assembly

Product Description: A high-precision thermal mass flow meter designed for accurate measurement and control of process gases in semiconductor manufacturing environments. It provides real-time flow data for critical gas delivery systems.
Technical Specifications:
  • Measurement Principle: Thermal mass flow sensing
  • Flow Range: 0–500 sccm (standard cubic centimeters per minute)