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AMAT 0190-35252

Product Name: Chamber Pneumatics Assembly
Product Description: A pre-assembled manifold system that integrates pneumatic valves, regulators, and sensors to control all pneumatic actuators within a process chamber.
Technical Specifications:
  • Valves: 4-port, 2-position solenoid valves (24V DC)

AMAT 0010-10371

Product Name: Optical Interlock Sensor Assembly
Product Description: A non-contact optical sensor assembly used to detect the presence/position of components and ensure safety interlock conditions in semiconductor equipment.
Technical Specifications:
  • Type: Through-beam optical sensor

AMAT 0050-00160

Product Name: UHP Pressure Regulator Assembly
Product Description: A precision, two-stage pressure regulator designed for the stable control of ultra-high purity (UHP) process gases in semiconductor gas distribution systems.
Technical Specifications:
  • Inlet Pressure: Up to 3000 PSIG

AMAT 3200-01201

Product Name: Quick-Disconnect Vacuum Fitting Assembly
Product Description: A high-integrity, stainless steel vacuum fitting assembly designed for rapid, leak-tight connections in ultra-high vacuum (UHV) gas lines and chamber interfaces.
Technical Specifications:
  • Material: 316L VIM/VAR stainless steel

AMAT 0190-14783

Product Name: RF Match Network Control Module
Product Description: An intelligent electronic control module that manages the automatic tuning of an RF impedance matching network for plasma processes.
Technical Specifications:
  • RF Frequency: 13.56 MHz (standard)

AMAT 0200-09432

Product Name: Plasma Tube Applicator, PRSP3, 25mm
Product Description: A precision-fabricated quartz plasma tube assembly designed to generate and contain remote plasma for in-situ chamber cleaning and pre-treatment processes.
Technical Specifications:
  • Material: High-purity fused quartz

AMAT 0200-03170

Product Name: Quartz Focus Ring / Gas Baffle
Product Description: A high-purity quartz ring engineered to optimize gas flow dynamics and focus plasma distribution uniformly over the wafer surface during semiconductor processing.
Technical Specifications:
  • Material: High-purity synthetic fused silica (quartz)

AMAT 0200-02107

Product Name: Ceramic Lift Pin Assembly
Product Description: A precision-machined ceramic component designed to lift and position wafers within semiconductor process chambers without causing contamination or damage.
Technical Specifications:
  • Material: High-purity alumina (Al₂O₃) ceramic, 99.6% purity

AMAT 0190-36109

Product Name: IPS Lamps Driver Assembly, 3-Zone, 5200
Product Description: A dedicated electronic driver module for controlling and powering the 3-zone infrared lamp array in the Integrated Plasma Source (IPS) of semiconductor processing systems.
Technical Specifications:
  • Zones: 3 independent controllable heating zones

AMAT 0140-15882-MA

Product Description: A high-performance, pre-terminated cable assembly designed for reliable signal and power transmission between control modules and peripheral devices in semiconductor manufacturing equipment.
Technical Specifications:
  • Conductors: Multi-stranded tinned copper, 24-18 AWG

AMAT 0050-07527

Product Name: Ultra-High Purity (UHP) Gas Filter Assembly
Product Description: A compact, high-efficiency gas purification filter designed to remove particulates and contaminants from ultra-high purity process gases in semiconductor gas delivery lines.
Technical Specifications:
  • Filter Type: Multi-stage sintered metal media filter

AMAT 0100-35057

Product Name: Mainframe Interlock Monitoring PCB Assembly
Product Description: A printed circuit board (PCB) that monitors and controls safety interlock switches throughout the semiconductor tool mainframe and process modules.
Technical Specifications:
  • Type: Multi-channel digital input/output (DIO) interlock board