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AMAT 0020-85925

Product Name: Process Chamber Shield & Liner Assembly
Product Description: A consumable shield and liner component installed inside the vacuum process chamber, used to protect the chamber body from plasma bombardment and chemical corrosion, collect process byproducts, optimize gas flow and plasma distribution, and maintain process stability and chamber cleanliness.
Technical Specifications:
  • Material: High‑purity anodized aluminum, 316L stainless steel, silicon carbide or ceramic composite

AMAT 0021-70220

Product Name: High‑Purity Ceramic Electrical Insulator & Plasma Isolation Component
Product Description: A high‑performance electrical insulation and plasma isolation component made of ultra‑high‑purity ceramic materials, used to isolate high‑voltage RF circuits, block plasma leakage, support internal components and prevent electrical breakdown in process chambers.
Technical Specifications:
  • Material: High‑purity alumina (Al₂O₃), yttria‑stabilized zirconia (YSZ) or boron nitride composite ceramic

AMAT 0010-47882

Product Name: Multi‑Zone Heater Pedestal & Wafer Support Assembly
Product Description: An integrated wafer support heater assembly with multi‑zone independent temperature control, used to provide precise and uniform thermal environment for wafers in thin film deposition and etching processes. It integrates heating, support and RF bias functions to meet complex process requirements.
Technical Specifications:
  • Temperature Control Range: Room temperature to 600°C

AMAT C190238

Product Name: Precision Machined Structural Component & Positioning Subassembly
Product Description: A customized high‑precision mechanical structural part developed for semiconductor wafer handling and chamber motion systems. It is used for precise positioning, load bearing, motion guidance and structural connection in automated material handling systems, ensuring the stability and repeatability of wafer transmission.
Technical Specifications:
  • Material: Aerospace‑grade 6061‑T6 aluminum alloy, 316L stainless steel optional

AMAT 0041-13111

Product Name: 300mm Electrostatic Chuck (ESC) Pedestal Subassembly
Product Description: This component is a high‑precision electrostatic chuck assembly dedicated to semiconductor wafer processing equipment, used to achieve non‑contact clamping, precise temperature control and stable support for 300mm wafers in high vacuum and plasma environments. It is a core component to ensure wafer position accuracy and process repeatability.
Technical Specifications:
  • Wafer Compatibility: 300mm monocrystalline silicon wafers and compound semiconductor wafers

Woodward 8280-500

Product Name: 723 Digital Speed Controller
Product Introduction: A low‑voltage digital controller for reciprocating engines, featuring integrated diagnostics and user‑configurable parameters for versatile industrial use.
Technical Specifications:
  • Power Input: 18–40 VDC (low voltage)

Woodward 8280-423

Product Name: 723PLUS Digital Marine Speed Controller (Medium/High Speed)
Product Introduction: A low‑voltage digital controller for twin‑engine marine applications with mechanical load sharing, optimized for medium/high‑speed engines (>100 RPM).
Technical Specifications:
  • Power Input: 18–40 VDC, 40 W
  • Speed Range: Medium/high speed (>100 RPM)

Woodward 8280-414

Product Name: 723PLUS Analog Load Sharing Digital Speed Control (Low Voltage)
Product Introduction: A low‑voltage digital speed controller with analog load sharing, designed for reciprocating engine generator sets, CSA‑certified for hazardous locations.
Technical Specifications:
  • Power Input: 18–40 VDC (nominal 24/32 VDC), 40 W

Woodward 8280-339

Product Name: 723/723PLUS Digital Control Module
Product Introduction: A digital speed and load control module for reciprocating engines, offering programmable logic and robust I/O for industrial and marine use.
Technical Specifications:
  • Power Input: 18–40 VDC (low voltage) or 90–150 VDC (high voltage)

Woodward 8280-153

Product Name: 723 Digital Control (High Voltage, No GUI)
Product Introduction: A high‑voltage digital controller for engine speed and load control, certified for hazardous locations (Class I, Div 2, Groups A‑D).
Technical Specifications:
  • Power Input: 90–150 VDC, 40 W

Woodward 8280-1001

Product Name: 723PLUS Digital Controller (Dual Speed Input)
Product Introduction: A high‑performance digital controller with dual speed inputs (MPU/proximity switch), designed for load sharing and torsional filtering applications.
Technical Specifications:
  • Power Input: 18–40 VDC, 40 W nominal

Woodward 8273-465

Product Name: ATLAS Control Module (without PC104)
Product Introduction: An industrial control module for heavy‑duty machinery speed and load regulation, designed for robust performance in harsh environments.
Technical Specifications:
  • Protection Class: IP54
  • Ambient Temperature: -10°C to +40°C