Digital guide
You are here:
AMAT 0200-02107
Product Name: Ceramic Lift Pin Assembly
Product Description: A precision-machined ceramic component designed to lift and position wafers within semiconductor process chambers without causing contamination or damage.
Technical Specifications:
- Material: High-purity alumina (Al₂O₃) ceramic, 99.6% purity
Detailed content
- Surface Finish: Polished to Ra < 0.4μm, non-porous
- Dimensional Tolerance: Diameter ±0.005mm, length ±0.01mm
- Thermal Stability: Withstands temperatures up to 1000°C
Functional Features:
- Non-conductive and chemically inert to all process gases and plasmas.
- High mechanical strength and wear resistance for long service life.
- Smooth surface prevents wafer scratching and particle generation.
- Low outgassing rate maintains ultra-high vacuum integrity.
Application Scenarios: Wafer lift mechanisms in PVD, CVD, Etch, and EPI chambers for 200mm and 300mm wafer platforms.
