Digital guide
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AMAT 0040-88716
Product Name: Electrostatic Chuck (ESC) Heater Assembly
Product Description: A precision heating element integrated with an electrostatic chuck (ESC) for maintaining uniform wafer temperature during high-vacuum semiconductor processes.
Technical Specifications:
- Heating Type: Resistive thin-film heater, dual-zone temperature control
Detailed content
- Temperature Range: 50°C to 450°C, stability ±0.5°C
- Voltage/Power: 208V AC, 1.2kW
- Material: Aluminum nitride (AlN) ceramic substrate with metallic heating traces
- Compatibility: For 200mm/300mm wafer ESC systems
Functional Features:
- Delivers exceptional thermal uniformity across the entire wafer surface.
- Fast heat-up and cool-down response for precise process temperature profiling.
- High dielectric strength compatible with electrostatic clamping voltages.
- Integrated thermal sensors for closed-loop temperature regulation.
Application Scenarios: CVD, PVD, and Etch chambers where precise wafer temperature control is critical.
