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AMAT 3320-01165
Product Name: PCII Adapter Alignment Bushing
Product Description: A precision-machined structural component designed for aligning and securing the PCII (Pressure Control Interface) adapter within 300mm semiconductor process chambers.
Technical Specifications:
- Material: 316L stainless steel, passivated surface
Detailed content
- Tolerance: Precision machining to ±0.001mm for critical alignment features
- Surface Finish: Electropolished to Ra < 0.8μm for cleanroom compatibility
- Mounting: Flanged design with precision counterbore holes
Functional Features:
- Maintains critical mechanical alignment under vacuum and thermal stress.
- High structural rigidity ensures long-term positional stability.
- Cleanroom-compatible finish prevents particle shedding.
- Direct replacement part for PCII adapter installation kits (0242-18504).
Application Scenarios: Pressure control interface installations in 300mm Endura PVD and Centura Etch chambers.
