Digital guide
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AMAT 0190-36109
Product Name: IPS Lamps Driver Assembly, 3-Zone, 5200
Product Description: A dedicated electronic driver module for controlling and powering the 3-zone infrared lamp array in the Integrated Plasma Source (IPS) of semiconductor processing systems.
Technical Specifications:
- Zones: 3 independent controllable heating zones
Detailed content
- Input Power: 208V AC, 3-phase
- Output Power: Up to 5kW per zone
- Control Interface: Analog (0-10V) and digital (RS-485) control signals
- Feedback: Integrated thermocouple input for closed-loop temperature control
Functional Features:
- Delivers precise, independent power regulation to each zone for optimal thermal uniformity.
- Provides over-temperature, over-current, and arc fault protection.
- Fast response time for dynamic temperature profiling during deposition processes.
- Direct compatibility with AMAT 5200 series IPS chambers.
Application Scenarios: Thermal control and heating in PVD, CVD, and ALD chambers utilizing 3-zone IR lamp heating systems.
